From tberg at stanford.edu Tue May 1 09:54:38 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 01 May 2012 09:54:38 -0700 Subject: Diffusion Morning Report 05/01/12 Message-ID: <4FA0154E.3020207@stanford.edu> Good Morning All, Looking OK this morning. Had A TGO fault for low flow on Epi Arsine-Adjusted flow will change filter. No more new problems. Leftovers: POCl3 and BBr3 sensor issues, Thermco 3 and 4 no TLC, TYlan Burnbox so all Tylan LPs are down,Epi silane issue, Tylan 1 and 2 poor uniformity. No other major issues at this time. Date: 5/1/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *re-assembling* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** ** Tylan 10-Nitride *down* *burn box* *14.22/30* ** ** Tylan 11-LTO *down* *burn box* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *needs test* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure-working on interlocks* ** ** *1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 2 06:28:21 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 02 May 2012 06:28:21 -0700 Subject: Diffusion Morning Report 05/02/12 Message-ID: <4FA13675.6040001@stanford.edu> Good Morning All, Looking somewhat grim this morning. New problems: Epi HCl cabinet is dead-calling vendor, Thermco Nitride may have a leak. Leftovers: Tylan burnbox-working on interlocks, Epi Silane, Thermco 3 and 4 no TLC, Tylans 1 and 2 growth rate and uniformity issues-need tests. No other major issues at this time. Date: 5/2/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *re-assembling* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** ** Tylan 10-Nitride *down* *burn box* *14.22/30* ** ** Tylan 11-LTO *down* *burn box* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *possible leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-HCl cabinet dead* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure-working on interlocks* ** ** *1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu May 3 06:08:55 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 03 May 2012 06:08:55 -0700 Subject: Diffusion Morning Report 05/03/12 Message-ID: <4FA28367.5070102@stanford.edu> Good Morning all, Looking about the same. No new issues overnight. Epi HCL cabinet display is on the way, Most interlocks for TYlan LPs are completed, Thermco nitride was run yesterday-waiting results,POCl3 and BBr3 sensor issues, Thermco 3 and 4 no TLC, Tylans 1 and 2 still have uniformity and thickness issuesl Resolved: Nitride leak, SiGe is back together. Date: 5/3/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *tgo sensor issue-ran BBr3 run-observed* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *re-assembling* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** ** Tylan 10-Nitride *down* *burn box* *14.22/30* ** ** Tylan 11-LTO *down* *burn box* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *down* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *possible leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-HCl cabinet dead* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure-working on interlocks* ** ** *1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri May 4 06:21:35 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 04 May 2012 06:21:35 -0700 Subject: Diffusion Morning Report 05/04/12 Message-ID: <4FA3D7DF.8050300@stanford.edu> Good Morning All, looking OK this morning. Epi had a couple of issues but is running now.Broken injector on BBR3. No other new problems. Leftovers: POCl3 sensor issues, Epi Silane, Thermco 3 and 4 no TLC, Tylans 1 and 2 thicknes and uniformity issues', Tylan burnbox REsolved: Thermco nitride is running, HCL for Epi-panel replaced. Date: 5/4/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *broken injector* ** ** *2* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** ** Tylan 10-Nitride *down* *burn box* *14.22/30* ** ** Tylan 11-LTO *down* *burn box* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *down* *high pressure-working on interlocks* ** ** *1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon May 7 06:38:01 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 07 May 2012 06:38:01 -0700 Subject: Diffusion Morning Report 05/07/12 Message-ID: <4FA7D039.1040902@stanford.edu> Good Morning All, Looking OK this morning. New issues-Tel Loader issues. Heater contactor issues on Epi. Leftovers: POCl3 and BBr3 sensor issues, No tlc on Thermco 3 and 4, Epi Silane, Tylan Burnbox, Tylan 1 and 2 uniformity and thickness. Resolved: all interlocks to Tylan LPs are installed and tested. Process testing in progress. BBr3 torch changed and testing. Date: 5//2012 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *low growth rate* ** ** *3* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *testing BBr3-after torch change* ** ** *2* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *15.78/30* ** ** Tylan 10-Nitride *down* *burn box* *14.22/30* ** ** Tylan 11-LTO *down* *burn box* *0./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues-contactor issues* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test-loader issues* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue May 8 06:20:47 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 08 May 2012 06:20:47 -0700 Subject: diffusion Morning Report 05/08/12 Message-ID: <4FA91DAF.2020101@stanford.edu> Good Morning All, Looking OK this morning. No new issues overnight. Leftovers: POCL3 and BBR3 sensor issues, BBr3 tube and torch replacement , Tylan 1 tube and torch replacement, Epi silane, Burnbox interlocks installed and tested-checking out recipes, Tylan 2 poor uniformity, Thermco 3 and 4 no TLC Resolved: epi contactor issue, TEL loader, Thermco Poly2 leak Date: 5/8/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *Replacing tube and torch* ** ** *1* Tylan 2 *yellow* *bad uniformity* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *Replacing tube and torch* ** ** *2* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 9 06:22:10 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 09 May 2012 06:22:10 -0700 Subject: Diffusion Morning Report 05/09/12 Message-ID: <4FAA6F82.3010401@stanford.edu> Good Morning All, Looking OK this morning. New issues-SEM 4160 image problems. Leftovers: Epi Silane, POCl3 and BBr3 sensor issues, BBR3 tube and torch replacement, Thermco 3 and 4 no TLC, Tylan burnbox-interlocks completed testing recipes,Tylans 1 and 2 poor std dev. No other major issues at this time. Resolved: Tylan 1 tube and torch replaced. Date: 5/9/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *high Std Dev* ** ** ** Tylan 2 *yellow* *high Std Dev* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *Replacing tube and torch* ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *SiH4 issues* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** * 1* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu May 10 06:25:04 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 10 May 2012 06:25:04 -0700 Subject: Diffusion Morning Report 05/10/12 Message-ID: <4FABC1B0.8090800@stanford.edu> Good Morning All, Looking OK this morning. New issues-Epi heater contactor issue. Leftovers:Thermco 3 and 4 no TLC, Tylan burnbox-testing recipes, interlocks completed, BBr3 tube change, Tylans 1 and 2 poor uniformity, POCl3 sensor issues. No other major problems at this time. Date: 5/10/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *high Std Dev* ** ** ** Tylan 2 *yellow* *high Std Dev* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *Replacing tube and torch* ** ** *3* Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri May 11 07:35:30 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 11 May 2012 07:35:30 -0700 Subject: Diffusion Morning Report Message-ID: <4FAD23B2.1050200@stanford.edu> Good Morning All, Ted is out today. Looking OK this morning. New issues-Epi heater contactor issue. Leftovers:Thermco 3 and 4 no TLC, Tylan burnbox-testing recipes, interlocks completed, Tylans 1 and 2 poor uniformity, POCl3 sensor issues. No other major problems at this time. Date: 5/11/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *high Std Dev* ** ** ** Tylan 2 *yellow* *high Std Dev* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* * * ** ** *mouring * Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon May 14 07:01:41 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 14 May 2012 07:01:41 -0700 Subject: Diffusion Morning Report Message-ID: <4FB11045.8010004@stanford.edu> Good Morning All, Ted is out today. Looking OK this morning. New issues-Epi heater contactor issue. Thermconitride no ammonia Leftovers:Thermco 3 and 4 no TLC, Tylan burnbox-testing recipes, interlocks completed, Tylans 1 and 2 poor uniformity, POCl3 sensor issues. No other major problems at this time. Date: 5/14/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *high Std Dev* ** ** ** Tylan 2 *yellow* *high Std Dev* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* * * ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* * no NH3 * ** ** * 2 * Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue May 15 07:23:38 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 15 May 2012 07:23:38 -0700 Subject: Diffusion Morning Report Message-ID: <4FB266EA.9000602@stanford.edu> Good Morning All, Ted is out today. Looking OK this morning. New issues-Epi heater contactor issue. Thermconitride ammonia cylinder is on leak check. Leftovers:Thermco 3 and 4 no TLC, Tylan burnbox testing recipes, interlocks completed, Tylans 1 and 2 poor uniformity, POCl3 sensor issues. No other major problems at this time. Date: 5/15/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *high Std Dev* ** ** ** Tylan 2 *yellow* *high Std Dev* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* * * ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* * NH3 on leak check * ** ** * 2 * Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 16 07:01:56 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 16 May 2012 07:01:56 -0700 Subject: Diffusion Morning Report 05/16/12 Message-ID: <4FB3B354.4010006@stanford.edu> Good Morning All, Looking Ok this morning. New/old issues-Epi heater contactor. Leftovers: Tylan burnbox, POCl3 sensor issue, Tylans 1 and 2 poor uniformity, Thermco 3 and 4 no TLC, Epi Silane, Resolved: NH3 cylinder changed Date: 5/16/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *high Std Dev* ** ** *3* Tylan 2 *yellow* *high Std Dev* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu May 17 06:26:14 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 17 May 2012 06:26:14 -0700 Subject: Diffusion Morning Report 05/17/12 Message-ID: <4FB4FC76.1030209@stanford.edu> Good Morning All, Looking Ok this morning. New issues DCs is empty-needs to be changed. Leftovers : Thermco 3 and 4 no TLC, POCL3 sensor issue, Epi Contactor issues, Tylan burnbox, Thermco Nitride-boatloader issues Resolved: Tylans 1 and 2 uniformity OK Date: 5/17/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box-No DCS* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *boatloader issues-no DCS* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues-No DCS* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri May 18 06:29:07 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 18 May 2012 06:29:07 -0700 Subject: Diffusion Morning Report 05/18/12 Message-ID: <4FB64EA3.5070000@stanford.edu> Good Morning All, Looking better this morning. DCS is changed and back on. No new problems overnight. Leftovers: Thermco 3 and 4 no TLC, POCl3 sensor, Tylan burnbox, Epi Silane and water flow issues,Thermco nitride BL issues Resolved or being resolved: DCS replaced, Silane panel replaced-leak testing today, BL board for Thermco nitride being replaced. Date: 5/18/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *tgo sensor issue tube reinstalled-ran POCl3 run* ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *boatloader issues* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon May 21 06:32:34 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 21 May 2012 06:32:34 -0700 Subject: Diffusion Morning Report 05/21/12 Message-ID: <4FBA43F2.5000007@stanford.edu> Good Morning All, Looking OK this morning. New issues FGA2 broken pull rod. Leftovers: Thermco 3 and 4 no TLC, Tylan burnbox, Epi contactor and water issues, Epi Silane Resolved: Thermco nitride BL issues, POCl3 sensor-maybe, Epi silane MFC and filter changed Date: 5/21/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *Fittings replaced-testing* ** ** *1* Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *yellow* *broken pull rod* ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue May 22 08:22:41 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 22 May 2012 08:22:41 -0700 Subject: Diffusion Morning Report 05/22/12 Message-ID: <4FBBAF41.7010401@stanford.edu> Good Morning All, Looking good this morning. No new issues overnight. Leftovers: Thermco 3 and 4 no TLC, Epi silane and contactor issues, tylan burnbox, no other major issues at this time. Resolved:fga2 pull rod replaced, POCl3 leaks repaired Date: 5/22/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* *rod replaced* ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 23 06:39:48 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 23 May 2012 06:39:48 -0700 Subject: Diffusion Morning Report 05/23/12 Message-ID: <4FBCE8A4.5070606@stanford.edu> Good Morning All, Looking good this morning. No new issues overnight. Leftovers:epi water flow-pos written waiting approval, epi silane-waiting on ICP Thermco and 4 no tlc, Tylan burnbox-rewriting recipes.No other major issues. Date: 5/23/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *down* *burn box* *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu May 24 06:41:20 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 24 May 2012 06:41:20 -0700 Subject: Diffusion Morning Report 05/24/12 Message-ID: <4FBE3A80.4030102@stanford.edu> Good Morning All, Looking good this morning. No new issues overnight.\ Leftovers: Epi water flow issues-fittings and flow switch on order, Epi silane ready to turn on once ICP is ready, Tylan burnbox-slowly turning back on LPs after interlocks and recipe changes, No TLC on Thermco 3 and 4 Resolved: Tylan LTO is available. > > Date: 5/24/12 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *up* ** ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *down* *burn box* *14.39/30* ** ** > Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** > Tylan 9-Poly *down* *burn box* *23.7/30* ** ** > Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** > Tylan 11-LTO *yellow* ** *9.7./30* ** ** > Tylan 12-FGA *up* ** ** ** ** > Thermco 1 *up* ** ** ** ** > Thermco 2 *up* ** ** ** ** > Thermco 3 *yellow* *testing TLC* ** ** ** > Thermco4 *yellow* *bad source controller-no TLC* ** ** ** > Thermco Poly1 *up* ** ** * > * ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *up* ** ** ** ** > Thermco bpsg *up* ** ** ** ** > AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* > ** ** *1* > AMAT Epi Cham. B *down* ** ** ** ** > TEL Spa *yellow* *needs test* ** ** ** > Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* > SEM 4160 *up* ** ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces *on* *crossover ok* *changeover working well* > ** ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri May 25 07:18:58 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 25 May 2012 07:18:58 -0700 Subject: Diffusion Morning Report Message-ID: <4FBF94D2.5050906@stanford.edu> Good Morning All, Ted is out today Looking good this morning. No new issues overnight. Leftovers: Epi water flow issues-fittings and flow switch on order, Epi silane ready to turn on once ICP is ready, Tylan burnbox-slowly turning back on LPs after interlocks and recipe changes, No TLC on Thermco 3 and 4 Resolved: Tylan LTO and Tylan TEOS are available Date: 5/25/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *Yellow* * * *0/30* ** ** Tylan 8-SiGe *down* *burn box* *0/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue May 29 06:55:10 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 29 May 2012 06:55:10 -0700 Subject: Diffusion Morning Report 05/29/12 Message-ID: <4FC4D53E.9060004@stanford.edu> Good Morning All, Looking good this morning. POCl3 is down again for a leak at the rear fitting. Leftovers: Cooing water on Epi-fittings and hose are here working on replacement, Tylan burnbox -altering recipes TEOS and LTO are back up,Thermco 3 and 4 no TLC Resolved: Silane for Epi and ICP is back on, TEOS OK to run> No other major issues at this time. Date: 5/29/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *down* *leak again* ** ** *1* Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *SiH4 issues-heater contactor issues* ** ** *2* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *3* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 30 06:12:48 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 30 May 2012 06:12:48 -0700 Subject: Diffusion Morning Report 05/30/12 Message-ID: <4FC61CD0.9050009@stanford.edu> Good morning All, Looking good this morning. New issues: 1. Tylan 5 door open issues Old issues ongoing: 1.POCl3 leak-Ray on it 2. Tylan burn box - altering recipes TEOS and LTO are back up. 3. Thermco 3 and 4 no TLC Resolved: 1. Epi water issues and Silane resolved Date: 5/30/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *down* *leak again* ** ** *1* Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu May 31 06:24:06 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 31 May 2012 06:24:06 -0700 Subject: Diffusion Morning Report 05/31/12 Message-ID: <4FC770F6.8010807@stanford.edu> Good morning All, Looking good this morning. *New issues: * 1. None over night *Old issues ongoing: * 1. BBr3 door issue-Ray on it 2. Tylan burn box - altering recipes TEOS and LTO are back up. 3. Thermco 3 and 4 no TLC *Resolved:* 1. POCl3 leak but only run when we are here Date: 5/31/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *down* *door issue* ** ** *1* Tylan 6-POCl3 *yellow* *leak resolved-need staff present to run* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *burn box* *3.4/30* ** ** Tylan 9-Poly *down* *burn box* *23.7/30* ** ** Tylan 10-Nitride *down* *burn box* *17.1/30* ** ** Tylan 11-LTO *yellow* ** *9.7./30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *bad source controller-no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *yellow* *needs test* ** ** ** Burn Box *yellow* *testing and modifying cvd recipes* ** ** *2* SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: