Diffusion Morning Report 05/03/12

Ted Berg tberg at stanford.edu
Thu May 3 06:08:55 PDT 2012


Good Morning all,
     Looking about the same. No new issues overnight.
     Epi HCL cabinet display is on the way, Most interlocks for TYlan 
LPs are completed, Thermco nitride was run yesterday-waiting 
results,POCl3 and BBr3 sensor issues, Thermco 3 and 4 no TLC, Tylans 1 
and 2 still have uniformity and thickness issuesl
     Resolved: Nitride leak, SiGe is back together.

					
	Date: 	5/3/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*yellow* 	*low growth rate* 	** 	** 	*3*
Tylan 2 	*yellow* 	*bad uniformity* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*tgo sensor issue-ran BBr3 run-observed* 	** 
** 	**
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*burn box* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*re-assembling* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*15.78/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box* 	*14.22/30* 	** 	**
Tylan 11-LTO 	*down* 	*burn box* 	*0./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*down* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*yellow* 	*possible leak* 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*down* 	*SiH4 issues-HCl cabinet dead* 	** 	** 	*2*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*down* 	*high pressure-working on interlocks* 	** 	** 	*1*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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