Diffusion Morning Report 05/07/12

Ted Berg tberg at stanford.edu
Mon May 7 06:38:01 PDT 2012


Good Morning All,
         Looking OK this morning. New issues-Tel Loader issues. Heater 
contactor issues on Epi.
         Leftovers: POCl3 and BBr3 sensor issues, No tlc on Thermco 3 
and 4, Epi Silane, Tylan Burnbox, Tylan 1 and 2 uniformity and thickness.
          Resolved: all interlocks to Tylan LPs are installed and 
tested. Process testing in progress. BBr3 torch changed and testing.

					
	Date: 	5//2012 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*yellow* 	*low growth rate* 	** 	** 	*3*
Tylan 2 	*yellow* 	*bad uniformity* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*testing BBr3-after torch change* 	** 	** 	*2*
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*burn box* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*burn box* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*15.78/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box* 	*14.22/30* 	** 	**
Tylan 11-LTO 	*down* 	*burn box* 	*0./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*SiH4 issues-contactor issues* 	** 	** 	**
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test-loader issues* 	** 	** 	**
Burn Box 	*yellow* 	*testing cvd recipes* 	** 	** 	*1*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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