Diffusion Morning Report 05/17/12

Ted Berg tberg at stanford.edu
Thu May 17 06:26:14 PDT 2012


Good Morning All,
     Looking Ok this morning. New issues DCs is empty-needs to be changed.
     Leftovers : Thermco 3 and 4 no TLC, POCL3 sensor issue, Epi 
Contactor issues, Tylan burnbox, Thermco Nitride-boatloader issues
     Resolved: Tylans 1 and 2 uniformity OK

					
	Date: 	5/17/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*yellow* 	*tgo sensor issue tube reinstalled-ran POCl3 
run* 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*burn box* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*burn box* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box-No DCS* 	*17.1/30* 	** 	**
Tylan 11-LTO 	*down* 	*burn box* 	*9.7./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*down* 	*boatloader issues-no DCS* 	** 	** 	*3*
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*down* 	*SiH4 issues-heater contactor issues-No 
DCS* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*yellow* 	*testing cvd recipes* 	** 	** 	*2*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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