Diffusion Morning Report 05/21/12

Ted Berg tberg at stanford.edu
Mon May 21 06:32:34 PDT 2012


Good Morning All,
     Looking OK this morning. New issues FGA2 broken pull rod.
     Leftovers: Thermco 3 and 4 no TLC, Tylan burnbox, Epi contactor and 
water issues, Epi Silane
     Resolved: Thermco nitride BL issues, POCl3 sensor-maybe, Epi silane 
MFC and filter changed

					
	Date: 	5/21/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*yellow* 	*Fittings replaced-testing* 	** 	** 	*1*
Tylan 7-TEOS2 	*down* 	*burn box* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*burn box* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box* 	*17.1/30* 	** 	**
Tylan 11-LTO 	*down* 	*burn box* 	*9.7./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*down* 	*SiH4 issues-heater contactor issues* 	** 
** 	*2*
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*yellow* 	*testing and modifying cvd recipes* 	** 	** 	*3*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*yellow* 	*broken pull rod* 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**



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