Diffusion Morning Report 05/24/12

Ted Berg tberg at stanford.edu
Thu May 24 06:41:20 PDT 2012


Good Morning All,
     Looking good this morning. No new issues overnight.\
     Leftovers: Epi water flow issues-fittings and flow switch on order, 
Epi silane ready to turn on once ICP is ready, Tylan burnbox-slowly 
turning back on LPs after interlocks and recipe changes, No TLC on 
Thermco 3 and 4
     Resolved: Tylan LTO is available.

> 					
> 	Date: 	5/24/12 	THICKNESS-Change at 		Priority
> Tube Name/Number 	Status 				
> Tylan 1 	*up* 	** 	** 	** 	**
> Tylan 2 	*up* 	** 	** 	** 	**
> Tylan 3 	*up* 	** 	** 	** 	**
> Tylan 4 	*up* 	** 	** 	** 	**
> Tylan 5-BBr3 	*up* 	** 	** 	** 	**
> Tylan 6-POCl3 	*up* 	** 	** 	** 	**
> Tylan 7-TEOS2 	*down* 	*burn box* 	*14.39/30* 	** 	**
> Tylan 8-SiGe 	*down* 	*burn box* 	*3.4/30* 	** 	**
> Tylan 9-Poly 	*down* 	*burn box* 	*23.7/30* 	** 	**
> Tylan 10-Nitride 	*down* 	*burn box* 	*17.1/30* 	** 	**
> Tylan 11-LTO 	*yellow* 	** 	*9.7./30* 	** 	**
> Tylan 12-FGA 	*up* 	** 	** 	** 	**
> Thermco 1 	*up* 	** 	** 	** 	**
> Thermco 2 	*up* 	** 	** 	** 	**
> Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
> Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
> Thermco Poly1 	*up* 	** 	** 	*
> * 	**
> Thermco Poly2 	*up* 	** 	** 	** 	**
> Thermco Nitride1 	*up* 	** 	** 	** 	**
> Thermco bpsg 	*up* 	** 	** 	** 	**
> AMAT Epi Cham. A 	*down* 	*SiH4 issues-heater contactor issues* 
> ** 	** 	*1*
> AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
> TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
> Burn Box 	*yellow* 	*testing and modifying cvd recipes* 	** 	** 	*2*
> SEM 4160 	*up* 	** 	** 	** 	**
> FGA2 	*up* 	** 	** 	** 	**
> SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 
> ** 	**
>

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