Diffusion Morning Report 05/30/12

Ted Berg tberg at stanford.edu
Wed May 30 06:12:48 PDT 2012


Good morning All,
     Looking good this morning.

New issues:
1. Tylan 5 door open issues
Old issues ongoing:
1.POCl3 leak-Ray on it
2. Tylan burn box - altering recipes TEOS and LTO are back up.
3. Thermco 3 and 4 no TLC

Resolved:
1. Epi water issues and Silane resolved

					
	Date: 	5/30/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*down* 	*leak again* 	** 	** 	*1*
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*burn box* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box* 	*17.1/30* 	** 	**
Tylan 11-LTO 	*yellow* 	** 	*9.7./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*up* 	** 	** 	** 	**
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*yellow* 	*testing and modifying cvd recipes* 	** 	** 	*2*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**



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