Diffusion Morning Report 05/31/12

Ted Berg tberg at stanford.edu
Thu May 31 06:24:06 PDT 2012


Good morning All,
     Looking good this morning.

*New issues: *
1. None over night

*Old issues ongoing: *
1.  BBr3 door issue-Ray on it
2. Tylan burn box - altering recipes TEOS and LTO are back up.
3. Thermco 3 and 4 no TLC

*Resolved:*
1. POCl3 leak but only run when we are here

					
	Date: 	5/31/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*down* 	*door issue* 	** 	** 	*1*
Tylan 6-POCl3 	*yellow* 	*leak resolved-need staff present to run* 
** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*burn box* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*burn box* 	*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*burn box* 	*17.1/30* 	** 	**
Tylan 11-LTO 	*yellow* 	** 	*9.7./30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*yellow* 	*testing TLC* 	** 	** 	**
Thermco4 	*yellow* 	*bad source controller-no TLC* 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*up* 	** 	** 	** 	**
AMAT Epi Cham. B 	*down* 	** 	** 	** 	**
TEL Spa 	*yellow* 	*needs test* 	** 	** 	**
Burn Box 	*yellow* 	*testing and modifying cvd recipes* 	** 	** 	*2*
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	*changeover working well* 	** 	**


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