From tberg at stanford.edu Thu Nov 1 06:25:05 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 01 Nov 2012 06:25:05 -0700 Subject: Diffusion Morning Report 11/01/12 Message-ID: <50927831.6090801@stanford.edu> Good Morning All, *1. New issues:Tylan 2 and 3 low growth,Thermco Poly1 bad manometer * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers*,*O2 in Silane? on Epi* *3. Resolved *:*TEOS canister replaced, * Date: 11/1/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *low dep* ** ** *2* Tylan 3 *yellow* *low dep* ** ** *2* Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* *cannister empty-replaced* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *yellow* *pump manometer bad* ** * * *3* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity-pump ordered* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 2 06:42:19 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 02 Nov 2012 06:42:19 -0700 Subject: Diffusion Morning Report 11/02/12 Message-ID: <5093CDBB.6000607@stanford.edu> Good Morning All, *1. New issues:TEL Spa low coolant * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*Tylan 2 and 3 low growth,* *3. Resolved *:*Thermco Poly 1 manometer replaced,Tel SPA coolant added, Tylan 2 and 3 need test after repair * Date: 11/2/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *low dep-needs test* ** ** *2* Tylan 3 *yellow* *low dep-needs test* ** ** *2* Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* *replaced pump manometer*** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity-pump ordered* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* *added coolant to chiller and restarted* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 5 06:32:28 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 05 Nov 2012 06:32:28 -0800 Subject: Diffusion Morning Report 11/05/12 Message-ID: <5097CDFC.70707@stanford.edu> Good Morning All, *1. New issues:User Jasonlin reported pressure control errors on Epi, but many users followed with none * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*Tylan 2 low growth,* *3. Resolved *:*Tylan 3 ok after repair** * Date: 11/5/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still low dep* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity-pump ordered* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles, H2 reg creep* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 6 06:24:07 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 06 Nov 2012 06:24:07 -0800 Subject: Diffusion Morning Report 11/06/12 Message-ID: <50991D87.2010701@stanford.edu> Good Morning All, *1. New issues:user jaeh***lee* reported MFS Alarms on Tylan LTO, user qran reported leaks on Thermco Nitride,Tylan 2 and 3 have H2 flow issues * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*Tylan 2 low growth,* *3. Resolved *:*Epi H2 stick replaced 3rd time looks OK now** * Date: 11/6/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *H2 flow issues* ** ** *3* Tylan 3 *down* *H2 flow issues* ** ** *3* Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *leak,slow pumping speed-poor uniformity-pump ordered* ** ** ** Thermco bpsg *down* *Mfsalarms* ** ** *2* AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 7 06:58:32 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 07 Nov 2012 06:58:32 -0800 Subject: Diffusion Morning Report 11/07/12 Message-ID: <509A7718.4090901@stanford.edu> Good Morning All, *1. New issues:user **jasonlin reports peeling on LTO-its normal, User junam reports no HCL flow * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*Tylan 2 low growth,**Tylan 2 H2 flow issues* *3. Resolved *:*Ray resolved gas flows on Tylan 3, Switched HCL cylinders, Ordered new cassettes for Epi2 * Date: 11/5/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *H2 flow issues* ** ** *2* Tylan 3 *up* *needs test* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *particles* *4.3/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity-pump ordered* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?,HCL cylinder change* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 8 06:32:20 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 08 Nov 2012 06:32:20 -0800 Subject: Diffusion Morning Report 11/08/12 Message-ID: <509BC274.2020101@stanford.edu> Good Morning All, *1. New issues:Thermco nitride shutdown can't pump**,Lamp fail on EPI -user still enabled?, Tylan LTO mfs errors * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*Tylan 2 low growth* *3. Resolved *:*Ray resolved gas flows on Tylan 2 needs test, Ordered new cassettes for Epi2 * ** Date: 11/8/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *4.3/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump cannot maintain pressure-newpump next week* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?,lamp issues* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 9 06:54:54 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 09 Nov 2012 06:54:54 -0800 Subject: Diffusion Morning Report 11/09/12 Message-ID: <509D193E.5070907@stanford.edu> Good Morning All, *1. New issues**:Running leak rates and tests on Epi * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*:Thermco nitride shutdown can't pump pump here next week*,*Tylan LTO mfs errors-checking it out* *3. Resolved *:Epi lamps changed*Ray resolved gas flows on Tylan 2 needs test, Ordered new cassettes for Epi2 * Date: 11/9/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *4.3/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump cannot maintain pressure-newpump next week* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?, running leak rates* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 12 06:21:01 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Nov 2012 06:21:01 -0800 Subject: Diffusion Morning Report 11/12/12 Message-ID: <50A105CD.40603@stanford.edu> Good Morning All, *1. New issues**:Epi doesn't heat up, POCl3 smells, Tylan 1 overtemp, FGA2 gas empty,Thermco Poly2 doesn't boat out, Thermco 1 low growth * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*:Thermco nitride shutdown can't pump pump here next week*, *3. Resolved *:*Tylan LTO mfs errors-ran cycle no problems * Date: 11/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *Overtemp tripped* ** ** *2* Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *chlorine smells* ** ** *4* Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *low growth rate* ** ** *5* Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *down* *doesn't boat out* ** ** *3* Thermco Nitride1 *down* *pump cannot maintain pressure-newpump next week* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?, doesn't heat up* ** ** *1* AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *yellow* *no forming gas* ** ** *2* SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 12 14:14:35 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Nov 2012 14:14:35 -0800 Subject: Diffusion Morning Report 11/12/12 Message-ID: <50A174CB.1020105@stanford.edu> Good Morning All, *1. New issues**: * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? on Epi*,*:Thermco nitride shutdown can't pump pump here end of week*,*POCl3 smells* *3. Resolved *:*Thermco Poly2engaged clutch,Replaced FGA cylinders, Reset Tylan 1 no overtemp, **,Thermco 1 low growth*-ran a test run all flows and temps normal,Epi -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 13 06:11:45 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 13 Nov 2012 06:11:45 -0800 Subject: Diffusion Morning Report 11/13/12 Message-ID: <50A25521.9030401@stanford.edu> Good Morning All, *1. New issues**: No GerH4 on EPi-should be here Thursday * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? *,*:Thermco nitride shutdown can't pump pump here end of week*,*POCl3 smells* *3. Resolved *:*Thermco Poly2engaged clutch,Replaced FGA cylinders, Reset Tylan 1 no overtemp, **,Thermco 1 low growth*-ran a test run all flows and temps normal,Epi adjusted hot idle power Date: 11/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *yellow* *chlorine smells* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump cannot maintain pressure-newpump this week* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?,no GeH4* ** ** ** AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 14 06:08:29 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 14 Nov 2012 06:08:29 -0800 Subject: Diffusion Morning Report 11/14/12 Message-ID: <50A3A5DD.7040901@stanford.edu> Good Morning All, *1. New issues**: none overnight * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? *,*:Thermco nitride shutdown can't pump pump here end of week*,*POCl3 smells-rebuilding the loader*,*No GeH4 on EPi-should be here Thursday* *3. Resolved *: Date: 11/14/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *down* *rebuilding loader* ** ** * 1** * Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump cannot maintain pressure-newpump this week* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?,no GeH4* ** ** ** AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 15 06:11:46 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 15 Nov 2012 06:11:46 -0800 Subject: Diffusion Morning Report 11/15/12 Message-ID: <50A4F822.8030105@stanford.edu> Good Morning All, *1. New issues**: none overnight * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? *,*:Thermco nitride shutdown can't pump pump here end of week*,*POCl3 smells-rebuilding the loader*,*No GeH4 on EPi-should be here Today 3. Resolved: * Date: 11/15/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *down* *rebuilding loader* ** ** * 1* Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump cannot maintain pressure-newpump this week* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?,GeH4 should be here today* ** ** ** AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 16 06:23:02 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 16 Nov 2012 06:23:02 -0800 Subject: Diffusion Morning Report 11/16/12 Message-ID: <50A64C46.5000307@stanford.edu> Good Morning All, *1. New issues**: GeH4 for Epi -delay until today hopefully,Nitride pump delayed until next week * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**particles on back of Epi wafers*,*O2 in Silane? *,*:Thermco nitride shutdown can't pump pump here next week*,*POCl3 smells-rebuilt the loader*,*No GeH4 on EPi-should be here Today 3. Resolved: * Date: 11/16/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* *still a bit thin* ** ** ** Tylan 3 *yellow* *flow control id error* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *down* *rebuilt loader will test today* ** ** *1* Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump cannot maintain pressure-newpump next week* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4?,GeH4 should be here today* ** ** ** AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 19 06:16:52 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 19 Nov 2012 06:16:52 -0800 Subject: Diffusion Morning Report 11/10/12 Message-ID: <50AA3F54.1040406@stanford.edu> Good Morning All, *1. New issues**: none over the weekend * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? *,*:Thermco nitride shutdown can't pump pump here this week*,,* 3. Resolved:* *POCl3 smells-rebuilt the loader test good, **GeH4 on EPi-replaced Friday, SIMS data for ?Epi is back * Date: 11/19/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* *rebuilt loader and tested fine* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump cannot maintain pressure-newpump this week?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4? SIMS is back* ** ** ** AMAT Epi Cham. B *down* ***At the county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 20 06:28:57 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 20 Nov 2012 06:28:57 -0800 Subject: Diffusion Morning Report 11/20/12 Message-ID: <50AB93A9.8000104@stanford.edu> Good Morning All, *1. New issues**: Broken sheaths on Tylan LTO * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? *,*:Thermco nitride shutdown can't pump old pump removed pump here this week*,,* 3. Resolved:**SIMS data for ?Epi is back analyzing * Date: 11/20/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* *broken injectors and sheaths * *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *old pump removed-newpump this week?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4? SIMS is back* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Nov 21 06:42:00 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 21 Nov 2012 06:42:00 -0800 Subject: Diffusion Morning Report Message-ID: <50ACE838.9090008@stanford.edu> Good Morning All, *1. New issues**: None over night. * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? *,*:Thermco nitride shutdown can't pump old pump removed pump here this week*,,* 3. Resolved:**SIMS data for ?Epi is back analyzing. BPSG quartz replaced, tube is up. * Date: 11/21/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* * * *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *old pump removed-newpump this week?* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4? SIMS is back* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Nov 26 06:26:16 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 26 Nov 2012 06:26:16 -0800 Subject: Diffusion Morning Report Message-ID: <50B37C08.1020400@stanford.edu> Good Morning All, *1. New issues**: EPI lamp failure * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? *,*:Thermco nitride pump here ** 3. Resolved:**SIMS data for ?Epi is back analyzing * Date: 11/26/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* *broken injectors and sheaths * *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump arrived Wednesday afternoon* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4? SIMS is back* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Nov 27 06:58:10 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 27 Nov 2012 06:58:10 -0800 Subject: Diffusion Morning Report Message-ID: <50B4D502.3030807@stanford.edu> Good Morning All, *1. New issues**: None overnight. * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? *,*:Thermco nitride pump here ** 3. Resolved:**SIMS data for ?Epi is back analyzing. EPI lamps replaced. * Date: 11/27/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* *broken injectors and sheaths * *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump arrived Wednesday afternoon* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4? SIMS is back* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Nov 28 06:12:45 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 28 Nov 2012 06:12:45 -0800 Subject: Diffusion Morning Report Message-ID: <50B61BDD.7020204@stanford.edu> Good Morning All, Ted is out today. *1**. New issues**: Tylan BPSG skipped dep step. * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? ****Thermco nitride pump here ** 3. Resolved:**SIMS data for ?Epi is back analyzing. EPI lamps replaced. * Date: 11/28/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* ***skipped dep step* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *trial run looked OK* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump arrived Wednesday afternoon* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4? SIMS is back* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 29 07:44:30 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 29 Nov 2012 07:44:30 -0800 Subject: Diffusion Morning Report 11/29/12 Message-ID: <50B782DE.3040801@stanford.edu> Good Morning All, *1**. New issues**: none over night * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? **Installing Thermco nitride pump, Epi dome coated ** 3. Resolved:**Tylan LTO O2 flow issues resolved * Date: 11/29/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* *broken injectors* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *installing the new pump* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in SiH4? SIMS is back-dome coated* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 30 06:33:43 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 30 Nov 2012 06:33:43 -0800 Subject: Diffusion Morning Report 11/30/12 Message-ID: <50B8C3C7.7030404@stanford.edu> Good Morning All, *1**. New issues**: none over night * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*,**O2 in Silane? **Installing Thermco nitride pump, Epi dome coated ** 3. Resolved:** * Date: 11/30/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *installing the new pump* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4? SIMS is back-dome coated* ** ** ** AMAT Epi Cham. B *down* ***At the county since 10/30/12* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: