From rseymour at stanford.edu Mon Oct 1 07:00:31 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 01 Oct 2012 07:00:31 -0700 Subject: Diffusion Morning Report Message-ID: <5069A1FF.9000106@stanford.edu> Good Morning All, Ted is out today. *1. New issues: EPI2 has a upper lamp failure * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved* Date: 10/1/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Oct 2 07:02:26 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 02 Oct 2012 07:02:26 -0700 Subject: Diffusion Morning Report Message-ID: <506AF3F2.20801@stanford.edu> Good Morning All, Ted is out today. *1. New issues:EP!2 scrubber/burnbox fault * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved *EPI2 lamps changed Date: 10/2/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 3 06:58:48 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 03 Oct 2012 06:58:48 -0700 Subject: Diffusion Morning Report 10/03/12 Message-ID: <506C4498.8040301@stanford.edu> Good Morning All, Ray is out today. *1. New issues:EP!2 DCS flow issue, SEM 4160 * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved *: Date: 10/3/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *DCS flow issues* ** ** ** AMAT Epi Cham. B *down* *waiting for permit* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *beam issues* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 4 06:26:27 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 04 Oct 2012 06:26:27 -0700 Subject: Diffusion Morning Report 10/04/12 Message-ID: <506D8E83.5090501@stanford.edu> Good Morning All, *1. New issues:TEL Cooling water flow issue * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,**SEM 4160 *3. Resolved *:*Germane for Epi is getting low, DCS for Epi? * Date: 10/4/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *DCS flow issues? GeH4 cylinder changed* ** ** ** AMAT Epi Cham. B *down* *waiting for permit* ** ** ** TEL Spa *down* *cooling water issues* ** ** *2* Burn Box *up* ** ** ** ** SEM 4160 *yellow* *beam issues ?* ** ** *1* FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 5 06:18:30 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 05 Oct 2012 06:18:30 -0700 Subject: Diffusion Morning Report 10/05/12 Message-ID: <506EDE26.9010807@stanford.edu> Good Morning All, *1. New issues:SEM 4160 poor resolution-FS is coming in * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks *3. Resolved *:*Tel cooling water, DCS for Epi * ** Date: 10/5/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* *waiting for permit* ** ** ** TEL Spa *up* *cooling water issues resolved* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *beam issues waiting FS* ** ** *1* FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * *** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 8 06:28:07 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 08 Oct 2012 06:28:07 -0700 Subject: Diffusion Morning Report 10/08/12 Message-ID: <5072D4E7.8000002@stanford.edu> Good Morning All, *1. New issues: SEM switch issue * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks *3. Resolved *:*SEM poor resolution** * Date: 10/8/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* *waiting for permit* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *switch issue* ** ** * 1** * FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 9 07:04:58 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 09 Oct 2012 07:04:58 -0700 Subject: Diffusion Morning Report 10/09/12 Message-ID: <50742F0A.6070107@stanford.edu> Good Morning All, *1. New issues: CL96 fault last night * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks *3. Resolved *:*SEM switch repaired, CL96 back on line * Date: 10/9/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* *waiting for permit* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 10 06:55:03 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 10 Oct 2012 06:55:03 -0700 Subject: Diffusion Morning Report 10/10/12 Message-ID: <50757E37.5060204@stanford.edu> Good Morning All, *1. New issues:Cannot put Epi Chamber on line * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks *3. Resolved *:Changed backup cylinder for DCS Date: 10/10/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** Tylan 2 *up* ** ** ** Tylan 3 *up* ** ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *up* ** ** ** Tylan 6-POCl3 *up* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** Tylan 11-LTO *up* ** *0/30* ** Tylan 12-FGA *up* ** ** ** Thermco 1 *up* ** ** ** Thermco 2 *up* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** Thermco4 *yellow* *no TLC* ** ** Thermco Poly1 *up* ** ** * * Thermco Poly2 *up* ** ** ** Thermco Nitride1 *up* ** ** ** Thermco bpsg *up* ** ** ** AMAT Epi Cham. A *down* *cannot put chamber on line* ** ** AMAT Epi Cham. B *down* *waiting for permit* ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** SEM 4160 *up* ** ** ** FGA2 *up* ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 11 06:11:11 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 11 Oct 2012 06:11:11 -0700 Subject: Diffusion Morning Report 10/11/12 Message-ID: <5076C56F.2060407@stanford.edu> Good Morning All, *1. New issues:Tylan LTO pump replaced-tube broken * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Cannot put Epi Chamber on line-creeping H2 regulator*-New reg will be at least next week. *3. Resolved *:Tylan LTO pump replaced Date: 10/11/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* *Pump replaced , tube broken* *0/30* ** * 1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *cannot put chamber on line-H2 reg creep* ** ** * 2* AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 12 06:18:40 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 12 Oct 2012 06:18:40 -0700 Subject: Diffusion Morning Report 10/12/12 Message-ID: <507818B0.4000700@stanford.edu> Good Morning All, *1. New issues:None overnight * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Cannot put Epi Chamber on line-creeping H2 regulator*-New reg will be at least next week. *3. Resolved *:Tylan LTO pump replaced, tube replaced needs test-thanks, Ray, Work around for H2 on Epi,replaced broken pull rods on FGA2 Date: 10/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *reg is bad -work around in place* ** ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 15 06:19:17 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 15 Oct 2012 06:19:17 -0700 Subject: Diffusion Morning Report 10/15/12 Message-ID: <507C0D55.7070801@stanford.edu> Good Morning All, *1. New issues:None overnight * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Cannot put Epi Chamber on line-creeping H2 regulator*-New reg will be at least next week. *3. Resolved *:Tylan LTO test good, Workaround for Epi Date: 10/15/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** Tylan 2 *up* ** ** ** Tylan 3 *up* ** ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *up* ** ** ** Tylan 6-POCl3 *up* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** Tylan 11-LTO *yellow* *tested good* *0/30* ** Tylan 12-FGA *up* ** ** ** Thermco 1 *up* ** ** ** Thermco 2 *up* ** ** ** Thermco 3 *yellow* *testing TLC* ** ** Thermco4 *yellow* *no TLC* ** ** Thermco Poly1 *up* ** ** * * Thermco Poly2 *up* ** ** ** Thermco Nitride1 *up* ** ** ** Thermco bpsg *up* ** ** ** AMAT Epi Cham. A *yellow* *reg is bad -work around in place* ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** SEM 4160 *up* ** ** ** FGA2 *up* ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 16 06:29:22 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 16 Oct 2012 06:29:22 -0700 Subject: Diffusion Morning Report 10/16/12 Message-ID: <507D6132.5020202@stanford.edu> Good Morning All, *1. New issues:Thermco Nitride no gas flows * *2. Ongoing issues:*Testing TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Cannot put Epi Chamber on line-creeping H2 regulator*-New reg Should be here today *3. Resolved *: Workaround for Epi, Hopefully installing Reg today Date: 10/16/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *tested good* *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *Yellow** * *gas flow issue? * ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *work around in place-reg may be changed today* ** ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 17 06:45:20 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 17 Oct 2012 06:45:20 -0700 Subject: Diffusion Morning Report 10/17/12 Message-ID: <507EB670.6040501@stanford.edu> Good Morning All, *1. New issues:Thermco Nitride slow pumping speed * *2. Ongoing issues:*Testing TLC on Thermco 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but transducer readout not compatible *3. Resolved *: TLC on Thermco 3 tested OK no alarms Date: 10/17/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ***TLC test was fine* ** ** ** Thermco4 *yellow* *testing TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *Regulator assy replaced transducer readout issue* ** ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 18 06:31:17 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 18 Oct 2012 06:31:17 -0700 Subject: Diffusion Morning Report 10/18/12 Message-ID: <508004A5.10203@stanford.edu> Good Morning All, *1. New issues:Thermco Nitride slow pumping speed,Silane sensor issues LP furnaces shut down * *2. Ongoing issues:*Testing TLC on Thermco 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps *3. Resolved *: TLC on Thermco 3 and 4 tested OK no alarms Date: 10/18/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** Tylan 2 *up* ** ** ** Tylan 3 *up* ** ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *up* ** ** ** Tylan 6-POCl3 *up* ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** Tylan 11-LTO *down* *silane TGO issue* *0/30* ** Tylan 12-FGA *up* ** ** ** Thermco 1 *up* ** ** ** Thermco 2 *up* ** ** ** Thermco 3 *up* ***TLC test was fine* ** ** Thermco4 *up* *TLC test was fine* ** ** Thermco Poly1 *down* *silane TGO issue* ** * * Thermco Poly2 *up* ** ** ** Thermco Nitride1 *down* *slow pumping speed* ** ** Thermco bpsg *down* *silane TGO issue* ** ** AMAT Epi Cham. A *yellow* *Regulator assy replaced still creeps* ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** SEM 4160 *up* ** ** ** FGA2 *up* ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Oct 19 07:58:17 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 19 Oct 2012 07:58:17 -0700 Subject: Diffusion Morning Report Message-ID: <50816A89.8090502@stanford.edu> Good Morning All, Ted is out today. *1. New issues:Thermco Nitride slow pumping speed. LPCVD silane off due to sensor fault. * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but transducer readout not compatible *3. Resolved *: TLC on Thermco 3,4 tested OK no alarms Date: 10/19/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ***TLC test was fine* ** ** ** Thermco4 *TLC test was good * ** ** ** Thermco Poly1 *down* ** ** * * ** Thermco Poly2 *down* ** ** ** ** Thermco Nitride1 *yellow* * High back pressure during dep * ** ** ** Thermco bpsg *down* ** ** ** ** AMAT Epi Cham. A *down* *Regulator assy replaced transducer readout issue* ** ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 22 06:36:02 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 22 Oct 2012 06:36:02 -0700 Subject: Diffusion Morning Report 10/22/12 Message-ID: <50854BC2.20505@stanford.edu> Good Morning All, *1. New issues: * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed. * *3. Resolved *: Date: 10/22/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ***TLC test was fine* ** ** ** Thermco4 *up* *TLC test was fine* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *slow pumping speed* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *Regulator assy replaced still creeps* ** ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with John B* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 23 05:59:23 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 23 Oct 2012 05:59:23 -0700 Subject: Diffusion Morning Report 10/23/12 Message-ID: <508694AB.4070707@stanford.edu> Good Morning All, *1. New issues:Cleaning Thermco Burn box * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed. * *3. Resolved *: Date: 10/23/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *slow pumping speed* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *Regulator assy replaced still creeps* ** ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with Aaron at SUFMO* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 24 06:32:24 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 24 Oct 2012 06:32:24 -0700 Subject: Diffusion morning Report 10/24/12 Message-ID: <5087EDE8.7010907@stanford.edu> Good Morning All, *1. New issues:Problems with low temp recipes on Epi * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed. * *3. Resolved *:Cleaned burn box Date: 10/2/24/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *Regulator assy replaced still creeps, low temp recipe issues* ** ** * 1* AMAT Epi Cham. B *down* *waiting for permit-drawings with Aaron at SUFMO* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 25 07:43:56 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 25 Oct 2012 07:43:56 -0700 Subject: Diffusion Morning Report 10/25/12 Message-ID: <5089502C.3010605@stanford.edu> Good Morning All, *1. New issues: Thermco Nitride Uniformity * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed. * *3. Resolved *: Date: 10/25/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *Regulator assy replaced still creeps, low temp recipe issues* ** ** ** AMAT Epi Cham. B *down* *waiting for permit-drawings with Aaron at SUFMO* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 26 06:18:50 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 26 Oct 2012 06:18:50 -0700 Subject: Diffusion Morning Report 10/26/12 Message-ID: <508A8DBA.1080102@stanford.edu> Good Morning All, *1. New issues: Thermco Nitride problems, paeticles on back of Epi wafers, FGA boat issues? * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed. * *3. Resolved *: Date: 10/26/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *yellow* *boat issue?* ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *replacing Reg assy today-particles on back* ** ** *1* AMAT Epi Cham. B *down* *waiting for permit-drawings with Aaron at SUFMO* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 29 06:12:21 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 29 Oct 2012 06:12:21 -0700 Subject: Diffusion Morning Report 10/29/12 Message-ID: <508E80B5.3070907@stanford.edu> Good Morning All, *1. New issues: Lamps out-Changing on EPI,O2 in Silane? on Epi * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers* *3. Resolved *:FGA boat loader-tightened clutch Date: 10/29/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* *boat issue?* ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *lamps out-O2 in sih4?* ** ** *1* AMAT Epi Cham. B *down* *waiting for permit-drawings with Aaron at SUFMO* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 30 06:37:38 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 30 Oct 2012 06:37:38 -0700 Subject: Diffusion Morning Report 10/30/12 Message-ID: <508FD822.5010607@stanford.edu> Good Morning All, *1. New issues:none over night * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers*,*O2 in Silane? on Epi* *3. Resolved *:Changed lamps on Epi, Changed backup HCL cylinder for Epi Date: 10/30/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in sih4?* ** ** *1* AMAT Epi Cham. B *down* ***Aaron at SUFMO signed off now to county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 31 06:21:19 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 31 Oct 2012 06:21:19 -0700 Subject: Diffusion Morning Report 10/31/12 Message-ID: <509125CF.7060407@stanford.edu> Good Morning All, Happy Haloween!! *1. New issues:TEOS canister is empty-replacing * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,Epi regulator assy installed but still creeps,*Thermco Nitride slow pumping speed.,**particles on back of Epi wafers*,*O2 in Silane? on Epi* *3. Resolved *:Pump ordered for Thermco Nitride Date: 10/31/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *cannister empty* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *yellow* *slow pumping speed-poor uniformity* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *O2 in sih4?possible particles* ** ** *1* AMAT Epi Cham. B *down* ***Aaron at SUFMO signed off now to county* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: