From rseymour at stanford.edu Tue Sep 4 07:10:47 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 04 Sep 2012 07:10:47 -0700 Subject: Diffusion Morning Report Message-ID: <50460BE7.1080504@stanford.edu> Good Morning All, Ted is out today. *1. New issues:none overnight* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: Tylanbpsg pull and clean completed Date: 9/4/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 5 06:23:11 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 05 Sep 2012 06:23:11 -0700 Subject: Diffusion Morning Report 09/05/12 Message-ID: <5047523F.9090203@stanford.edu> Good Morning All, Ray is out today. *1. New issues:none overnight* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: Tylanbpsg tested good Date: 9/5/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* *pull and clean completed and tested* *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Sep 6 06:35:39 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 06 Sep 2012 06:35:39 -0700 Subject: Diffusion Morning Report Message-ID: <5048A6AB.7070208@stanford.edu> Good Morning All, Ted's computer is down this morning. *1. New issues:none overnight* *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: Date: 9/6/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* * * *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 7 06:31:29 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 07 Sep 2012 06:31:29 -0700 Subject: Diffusion Morning Report Message-ID: <5049F731.8060009@stanford.edu> Good Morning All, Ted's computer is down today. *1. New issues:none overnight* TEOS base pressure and dep pressure issues. *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: Date: 9/7/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 7 06:50:49 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 07 Sep 2012 06:50:49 -0700 Subject: Fwd: Diffusion Morning Report In-Reply-To: <5049F731.8060009@stanford.edu> References: <5049F731.8060009@stanford.edu> Message-ID: <5049FBB9.6010604@stanford.edu> Good Morning All, Ted's computer is down today. *1. New issues:none overnight* TEOS base pressure and dep pressure issues. *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: The EPI2 issues were resolved yesterday Date: 9/7/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 10 06:43:53 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 10 Sep 2012 06:43:53 -0700 Subject: Diffusion Morning Report 09/10/12 Message-ID: <504DEE99.1020007@stanford.edu> Good Morning All, *1. New issues:Tylan LTO no O2 flow,Tylan 2 tc issues * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: The EPI2 issues were resolved yesterday Date: 9/10/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *bad tc readings* ** ** * 2 * Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *down* *no O2 flow* *0/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 11 06:11:40 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 11 Sep 2012 06:11:40 -0700 Subject: Diffusion Morning Report 09/11/12 Message-ID: <504F388C.8070004@stanford.edu> Good Morning All, *1. New issues:Tylan 1 is in Argon for user, Plasmatherm seminar is good * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: Tylan Lto-replaced MFS 460 front panel did test Date: 9/11/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 12 06:39:43 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 12 Sep 2012 06:39:43 -0700 Subject: Diffusion Morning Report 09/12/12 Message-ID: <5050909F.4040503@stanford.edu> Good Morning All, *1. New issues: Plasmatherm seminar was good * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: Tylan 1 back in N2 after user finished Date: 9/12/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 13 06:14:35 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 13 Sep 2012 06:14:35 -0700 Subject: Diffusion Morning Report 09/13/12 Message-ID: <5051DC3B.40003@stanford.edu> Good Morning All, *1. New issues:Changing 1% B2H6 for Epi, TEOS canister empty * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested waiting further instructions after alarms, *3. Resolved*: Date: 9/13/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *canister empty* *14.39/30* ** *2* Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *1% B2H6 cylinder change* ** ** *1* AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 14 06:33:27 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 14 Sep 2012 06:33:27 -0700 Subject: Diffusion Morning Report 09/14/12 Message-ID: <50533227.30706@stanford.edu> Good Morning All, *1. New issues: Ray is out today working with Mike Bell on new badger * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *3. Resolved*: 1% B2H6 FOR Epi cylinder changed, TEOS ampule changed slow pumping addressed Date: 9/14/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* *canister replaced pumping issue resolved* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* *1% B2H6 cylinder change completed* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 17 06:31:53 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 17 Sep 2012 06:31:53 -0700 Subject: Diffusion Morning Report 09/17/12 Message-ID: <50572649.40700@stanford.edu> Good Morning All, *1. New issues: Forming gas is empty-will change, sem4160 SEC valve not opening * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *3. Resolved*: Date: 9/17/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *down* *no forming gas* ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *yellow* *sec valve won't open* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 18 06:11:05 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 18 Sep 2012 06:11:05 -0700 Subject: Diffusion Morning Report 09/18/12 Message-ID: <505872E9.6070103@stanford.edu> Good Morning All, *1. New issues: None overnight * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *3. Resolved*: *Forming gas changed, sem4160 SEC valve opening * Date: 9/18/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *yellow* *thin dep* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 19 06:25:37 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 19 Sep 2012 06:25:37 -0700 Subject: Diffusion Morning Report 09/19/12 Message-ID: <5059C7D1.90203@stanford.edu> Good Morning All, *1. New issues: Ran Nitride test None overnight * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *3. Resolved*: ** Date: 9/19/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** *1* Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** *2* Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 20 06:24:39 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 20 Sep 2012 06:24:39 -0700 Subject: Diffusion Morning Report 09/20/12 Message-ID: <505B1917.6000706@stanford.edu> Good Morning All, *1. New issues: Ran Tylan Poly test Had a problem with HCl pigtail * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks *3. Resolved*: MOCVD Glove box regened Date: 9/20/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** *1* Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** *2* Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 21 06:35:39 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 21 Sep 2012 06:35:39 -0700 Subject: Diffusion Morning Report 09/21/12 Message-ID: <505C6D2B.1050802@stanford.edu> Good Morning All, *1. New issues: Running Nitride test, Germane for Epi is getting low * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks *3. Resolved*: Date: 9/21/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * installing bhadger box * ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** *1* Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** *2* Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 24 06:22:08 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 24 Sep 2012 06:22:08 -0700 Subject: Diffusion Morning Report 09/24/12 Message-ID: <50605E80.80907@stanford.edu> Good Morning All, *1. New issues:Epi Recipe issue, Tylan LTO loader sheath broken * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved*:Badger interlock installed in Thermco 1,several tests on Tylan Nitride Date: 9/24/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* *badger interlock installed* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* *broken loader fork sheath* *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *issues with chamber a etchcoat* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 25 07:29:33 2012 From: tberg at stanford.edu (Ted Berg) Date: Tue, 25 Sep 2012 07:29:33 -0700 Subject: Diffusion Morning Report 09/25/12 Message-ID: <5061BFCD.6070508@stanford.edu> Good Morning All, *1. New issues:installing several badger interlocks * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved*:*Tylan LTO loader sheath replaced * Date: 9/25/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* *installing badger interlock* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* *installing badger interlock* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *installing badger interlock* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *possible recipe issue* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* *installing badger interlock* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 26 06:20:18 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 26 Sep 2012 06:20:18 -0700 Subject: Diffusion Morning Report 09/26/12 Message-ID: <50630112.90802@stanford.edu> Good Morning All, *1. New issues:None overnight * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved*:Installed 4 Badger interlocks Date: 9/26/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* *installed badger interlock* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* *installed badger interlock* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *installing badger interlock* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *possible recipe issue* ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* *installed badger interlock* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 27 06:11:13 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 27 Sep 2012 06:11:13 -0700 Subject: Diffusion Morning Report 09/27/12 Message-ID: <50645071.3020101@stanford.edu> Good Morning All, *1. New issues:None overnight * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved*:EPI recipe issue resolved Date: 9/27/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 28 06:24:05 2012 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 28 Sep 2012 06:24:05 -0700 Subject: Diffusion Morning Report Message-ID: <5065A4F5.9060806@stanford.edu> Good Morning All, Ted is out today. *1. New issues:None overnight * *2. Ongoing issues:*No TLC on Thermco 3 and 4, Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, working on Badger interlocks,*Germane for Epi is getting low* *3. Resolved* Date: 9/28/12 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *up* ** *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *testing TLC* ** ** ** Thermco4 *yellow* *no TLC* ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: