From tberg at stanford.edu Fri Feb 1 06:22:09 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 01 Feb 2013 06:22:09 -0800 Subject: [diffusion] Diffusion Morning Report 02/01/13 Message-ID: <510BCF91.5020001@stanford.edu> Good Morning All, *1**. New issues**:*EPI Chamber A coated * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Epi pressure control chamber A,**Tylan 2 poor uniformity* *3. Resolved:**Replaced leaking Pumo line on EPI chamber A,Slowly bringing up Epi Chamber B, Waiting Maurice for wafer tests * Date: 2/1/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testingcleaning dome* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-ran etches* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 4 06:25:11 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 04 Feb 2013 06:25:11 -0800 Subject: [diffusion] Diffusion Morning Report 02/04/13 Message-ID: <510FC4C7.9060004@stanford.edu> Good Morning All, *1**. New issues**:*EPI Chamber Bpump issues * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Tylan 2 poor uniformity* *3. Resolved:**Cleaned dome and liiners, replaced suceptor on Chamber A of Epi * Date: 2/4/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *down* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *pump issues* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testingcleaning dome* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-ran etches* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 5 06:15:11 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 05 Feb 2013 06:15:11 -0800 Subject: [diffusion] D iffusion Morning report 02/05/13 Message-ID: <511113EF.1090002@stanford.edu> Good Morning All, *1**. New issues**:*EPI Chamber A and B pump issues * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Tylan 2 poor uniformity* *3. Resolved:** * Date: 2/5/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-chamber quartz replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-bad pump* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 6 06:18:07 2013 From: tberg at stanford.edu (Ted Berg) Date: Wed, 06 Feb 2013 06:18:07 -0800 Subject: [diffusion] Diffusion Morning Report 2/06/13 Message-ID: <5112661F.5090803@stanford.edu> Good Morning All, *1**. New issues**:*EPI Chamber A and B pumps out for repair,TEL-wafer slide issue * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Tylan 2 poor uniformity* *3. Resolved:** * Date: 2//2013 THICKNESS-Change at Priority Tube Name/Number *Status* ** ** ** ** Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-chamber quartz replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-bad pump* ** ** *2* TEL Spa *yellow* *wafer slide error* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 7 06:18:51 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Feb 2013 06:18:51 -0800 Subject: [diffusion] Diffuzsion Morning Report 02/07/13 Message-ID: <5113B7CB.7040402@stanford.edu> Good Morning All, *1**. New issues**:*EPI Chamber A and B pumps out for repair * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Tylan 2 poor uniformity* *3. Resolved:****TEL-wafer slide issue * Date: 2/7/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still thin* ** ** *4* Tylan 3 *yellow* *thin?* ** ** *4* Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *leak* ** ** *3* Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-chamber quartz replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-bad pump* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 8 06:13:07 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Feb 2013 06:13:07 -0800 Subject: [diffusion] Diffusion Morning Report 02/08/13 Message-ID: <511507F3.50800@stanford.edu> Good Morning All, *1**. New issues**:None overnight* * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A pump out for repair,*Tylan 3 thin,**Tylan 2 poor uniformity* *3. Resolved:**Thermco Nitride is back up**, Epi Chamber B pump is back-reinstalling * Date: 2/8/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still thin* ** ** *3* Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* *leak* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-chamber quartz replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-installing pump* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 11 06:24:54 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Feb 2013 06:24:54 -0800 Subject: [diffusion] Diffusion Morning Report 02/11/13 Message-ID: <5118FF36.2040800@stanford.edu> Good Morning All, *1**. New issues**:BBr3 temp issue*? * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A pump out for repair,*Tylan 3 thin,**Tylan 2 poor uniformity* *3. Resolved:****Epi Chamber B pump installed, Transfer chamber Robot replaced and leak checked * Date: 2/11/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *flow checks and temp cal* ** ** *3* Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue?* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-chamber quartz replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-installing pump* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 12 06:14:44 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Feb 2013 06:14:44 -0800 Subject: [diffusion] Diffusion Morning Report 02/12/13 Message-ID: <511A4E54.2050509@stanford.edu> Good Morning All, *1**. New issues**:*none overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A pump out for repair,*Tylan 3 thin,**Tylan 2 poor uniformity*, Tylan5 Temp issues *3. Resolved:****Epi Chamber B pump installed, Transfer chamber Robot replaced and leak checked * ** Date: 2/12/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *flow checks and temp cal* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue?* ** ** *3* Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-robot rebuilt-transfer leak checked* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-installing pump* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 13 06:05:37 2013 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 Feb 2013 06:05:37 -0800 Subject: [diffusion] Diffusion Morning Report 02/13/13 Message-ID: <511B9DB1.3020009@stanford.edu> Good Morning All, *1**. New issues**:*Tel Pumps off PCW issues, Several tools off because of PCW and CDA issues * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A pump out for repair,*Tylan 3 thin,**Tylan 2 poor uniformity*, Tylan5 Temp issues *3. Resolved:**Several tools brought back up after PCW and CDA fails yesterday * Date: 2/13/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *flow checks and temp cal* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue?* ** ** *3* Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-robot rebuilt-transfer leak checked* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-installing pump* ** ** *2* TEL Spa *down* *pumps off P CW* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 14 05:47:46 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Feb 2013 05:47:46 -0800 Subject: [diffusion] Diffusion Morning Report 02/14/13 Message-ID: <511CEB02.8030009@stanford.edu> Good Morning All, Happy Valentine's Day *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * ,*Tylan 3 thin,**Tylan 2 poor uniformity*, Tylan5 Temp issues,Tel Pumps off PCW issues, *3. Resolved:****EPI Chamber A pump back from repair * Date: 2/14/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *flow checks and temp cal* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue?* ** ** *3* Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-robot rebuilt-transfer leak checked* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-installing pump* ** ** *2* TEL Spa *down* *pumps off P CW* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Feb 15 06:38:27 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 15 Feb 2013 06:38:27 -0800 Subject: [diffusion] Diffusion Morning Report Message-ID: <511E4863.7040709@stanford.edu> Good Morning All, Ted is out today. *1**. New issues**:*None overnight. * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A pump out for repair,*Tylan 3 thin,**Tylan 2 poor uniformity*, Tylan5 Temp issues *3. Resolved:**Several tools brought back up after PCW and CDA fails yesterday * Date: 2/14/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *flow checks and temp cal* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue?* ** ** *3* Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *bad pump-robot rebuilt-transfer leak checked* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-installing pump* ** ** *2* TEL Spa *down* *pumps off P CW* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 19 07:11:43 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 19 Feb 2013 07:11:43 -0800 Subject: [diffusion] Diffusion Morning Report 02/19/13 Message-ID: <5123962F.2020208@stanford.edu> Good Morning All, *1**. New issues**:*None over the weekend * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A testing,*Epi chamber B pump back today,Tylan 3 thin,**Tylan 2 poor uniformity*, Tylan5 Temp issues *3. Resolved:**FGA2 no problem found * ** Date: 2/19/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** *3* Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump replaced, transfer leaks fixed* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump out* ** ** *2* TEL Spa *down* *pumps off P CW* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 20 06:18:38 2013 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Feb 2013 06:18:38 -0800 Subject: [diffusion] Diffusion Morning Report 02/20/13 Message-ID: <5124DB3E.9000509@stanford.edu> Good Morning All, *1**. New issues**:*None over night * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A testing,*Tylan 3 thin,**Tylan 2 poor uniformity*, TEL pumps off PCW issues *3. Resolved:****Epi chamber B pump installed, * Date: 2/20/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump replaced, transfer leaks fixed* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *down* *pumps off P CW* ** ** *3* Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 21 06:10:54 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Feb 2013 06:10:54 -0800 Subject: [diffusion] Diffusion Morning Report 02/21/13 Message-ID: <51262AEE.8010105@stanford.edu> Good Morning All, *1**. New issues**:*Epi chamber A blower fail * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A testing,*Tylan 3 thin,**Tylan 2 poor uniformity*, TEL pumps off PCW issues *3. Resolved:****Tel pumps restarted back in Vacuum * Date: 2/21/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump out again! transfer leaks fixed* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 22 07:41:41 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 Feb 2013 07:41:41 -0800 Subject: [diffusion] Diffusion Morning Report 02/22/13 Message-ID: <512791B5.1000500@stanford.edu> Good Morning All, *1**. New issues**:*Thermco thick dry ox * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A *pump out for repair,**Tylan 3 thin,**Tylan 2 poor uniformity*, *3. Resolved:**Epin Chamber B quartz replaced-etch coat completed-needs testing * Date: 2/22/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *OK* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?thick?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump out again! transfer leaks fixed* ** ** *1* AMAT Epi Cham. B *down* *testing-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 25 06:04:49 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 25 Feb 2013 06:04:49 -0800 Subject: [diffusion] Diffusion Morning Report 02/25/13 Message-ID: <512B6F81.2000901@stanford.edu> Good Morning All, *1**. New issues**:*No new issues over the weekend * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A *pump out for repair,**Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved:**Epi Chamber B quartz replaced testing * Date: 2/25/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *OK* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?thick?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump out again! transfer leaks fixed* ** ** *1* AMAT Epi Cham. B *down* *testing* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 26 06:12:09 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 26 Feb 2013 06:12:09 -0800 Subject: [diffusion] Diffusion Morning Report 02/26/13 Message-ID: <512CC2B9.5080409@stanford.edu> Good Morning All, *1**. New issues**:*No new issues over night * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A *pump out for repair,**Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved:**Epi Chamber B quartz replaced testing * Date: 2/26/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump out for repair-hopefully back tomorrow or Thursday* ** ** *1* AMAT Epi Cham. B *yellow* *testing* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Feb 27 06:29:11 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 27 Feb 2013 06:29:11 -0800 Subject: [diffusion] Diffusion Morning Report Message-ID: <512E1837.1000801@stanford.edu> Good Morning All, Ted is out today. *1**. New issues**:* EPI2, wafer stuck in transfer chanber. * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A *pump out for repair,**Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved:**Epi Chamber B quartz replaced testing * Date: 2/27/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump out for repair-hopefully back tomorrow or Thursday* ** ** *1* AMAT Epi Cham. B *yellow* *testing* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 28 06:30:56 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 28 Feb 2013 06:30:56 -0800 Subject: [diffusion] Diffusion Morning Report 02/28/12 Message-ID: <512F6A20.1050102@stanford.edu> Good Morning All, *1**. New issues**:* None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A *pump out for repair,**Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved:**Epi Chamber B stuck wafer retreived * Date: 2/28/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump out for repair-hopefully back today* ** ** *1* AMAT Epi Cham. B *yellow* *testing* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: