From tberg at stanford.edu Mon Jan 14 06:31:01 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 14 Jan 2013 06:31:01 -0800 Subject: [diffusion] Diffusion Morning Report 01/14/13 Message-ID: <50F416A5.6040908@stanford.edu> Good Morning All, *1**. New issues**: None over the weekend * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, For Epi second chamber*Today***building** ,***McVittie testing TEL*, Thermco Nitride thick*Tylans 2 and 3 thin,**Epi pressure control,* *** 3. Resolved:****SEM4160 stage homed,*For Epi second chamber *Fire inspection passed * Date: 1/14/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing* ** ** *1* AMAT Epi Cham. B *down* *waiting building inspection* ** ** ** TEL Spa *yellow* *McVittie testing* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *down* *stage not homed* ** ** *2* FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 15 06:14:13 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 15 Jan 2013 06:14:13 -0800 Subject: [diffusion] Diffusion Morning Report 01/15/13 Message-ID: <50F56435.4000801@stanford.edu> Good Morning All, *1**. New issues**: None over night Ray is out sick today * *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, ,***McVittie testing TEL*, Thermco Nitride thick*Tylans 2 and 3 thin,**Epi pressure control,* *** 3. Resolved:***For Epi second chamber*Final inspection Passed * Date: 1/15/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure issues* ** ** *1* AMAT Epi Cham. B *down* *inspection completed-Applied doing final checkout* ** ** ** TEL Spa *yellow* *McVittie testing* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Jan 16 07:02:29 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 16 Jan 2013 07:02:29 -0800 Subject: [diffusion] Diffusion Morning Report Message-ID: <50F6C105.4030600@stanford.edu> Good Morning All, *Ted is out today* *1**. New issues**: None over night. * * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, ,***McVittie testing TEL*, Thermco Nitride thick*Tylans 2 and 3 thin,**Epi pressure control,* ***3. Resolved:***For Epi second chamber*Final inspection Passed * Date: 1/16/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure issues* ** ** *1* AMAT Epi Cham. B *down* *inspection completed-Applied doing final checkout* ** ** ** TEL Spa *yellow* *McVittie testing* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 17 06:08:14 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 17 Jan 2013 06:08:14 -0800 Subject: [diffusion] DEiffusion Morning Report 01/17/13 Message-ID: <50F805CE.8030701@stanford.edu> Good Morning All, *1**. New issues**: None over night. * * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, ,***McVittie testing TEL*, Thermco Nitride thick*Tylans 2 and 3 thin,**Epi pressure control,* ***3. Resolved:***For Epi second chamber*Final inspection Passed * Date: 1/17/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure issues* ** ** *1* AMAT Epi Cham. B *down* *inspection completed-Applied doing final checkout* ** ** ** TEL Spa *yellow* *McVittie testing* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Jan 18 06:37:11 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 18 Jan 2013 06:37:11 -0800 Subject: [diffusion] Diffusion Morning Report Message-ID: <50F95E17.7070800@stanford.edu> Good Morning All, Ted is out today. *1**. New issues**: None over night. * * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, ,***McVittie testing TEL*, Thermco Nitride thick*Tylans 2 and 3 thin,**Epi pressure control,* *3. Resolved:***For Epi second chamber*Final inspection Passed * Date: 1/18/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *28.0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure issues* ** ** *1* AMAT Epi Cham. B *down* *inspection completed-Applied doing final checkout* ** ** ** TEL Spa *yellow* *McVittie testing* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 22 08:21:37 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 22 Jan 2013 08:21:37 -0800 Subject: [diffusion] Diffusion Morning Report 01/22/13 Message-ID: <50FEBC91.1070101@stanford.edu> Good Morning All, *1**. New issues**: Epi chamber A pump is bad*, Chamber B pump out for repair * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, ,***McVittie testing TEL*, Thermco Nitride thick*Tylans 2 and 3 thin,**Epi pressure control,* *3. Resolved:****SEM4160-rehomed stage**, McVittie is finished with TEL * Date: 1/22/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-bad pump* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-bad pump* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 23 06:02:16 2013 From: tberg at stanford.edu (Ted Berg) Date: Wed, 23 Jan 2013 06:02:16 -0800 Subject: [diffusion] Diffusion Morning Report 01/23/13 Message-ID: <50FFED68.9080906@stanford.edu> Good Morning All, *1**. New issues**:Tylan 1 not working* * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, ,***McVittie testing TEL*, Thermco Nitride thick*Tylans 2 and 3 thin,**Epi pressure control,* *3. Resolved:****Replaced pumps on both Epi Chambers * Date: 1/23/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *nothing working* ** ** ** Tylan 2 *yellow* *still a bit thin* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pump replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 24 06:14:15 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 24 Jan 2013 06:14:15 -0800 Subject: [diffusion] Diffusion Morning Report 01/24/13 Message-ID: <510141B7.7090807@stanford.edu> Good Morning All, *1**. New issues**:Tylan 2 poor uniformity* * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, Thermco Nitride thick*Tylan 3 thin,**Epi pressure control,* *3. Resolved:****Tylan 2 reset system and ran recipe * Date: 1/24/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test* ** ** ** Tylan 2 *down* *poor uniformity* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep* *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pump replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 25 06:25:20 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 25 Jan 2013 06:25:20 -0800 Subject: [diffusion] Diffusion Morning Report 01/25/13 Message-ID: <510295D0.6030902@stanford.edu> Good Morning All, *1**. New issues**:*LTO had high dep pressure * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, testing furnaces*, Thermco Nitride thick*Tylan 3 thin,**Epi pressure control,**Tylan 2 poor uniformity* *3. Resolved:**** * Date: 1/25/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test* ** ** ** Tylan 2 *down* *poor uniformity-loader issues* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *thick dep-high pressure** * *4.3/30* ** * 3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pump replaced* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 28 06:43:40 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 28 Jan 2013 06:43:40 -0800 Subject: [diffusion] Diffusion morning report 01/28/13 Message-ID: <51068E9C.1050103@stanford.edu> Good Morning All, *1**. New issues**:*LTO N2 purge issue * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Epi pressure control,**Tylan 2 poor uniformity* *3. Resolved:***LTO had high dep pressure-pump replaced,Silane gas cabinet reset Date: 1/28/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test* ** ** ** Tylan 2 *down* *poor uniformity-loader issues* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* *Replaced pump -N2purge leak* *4.3/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* *Reset Silane cabinet and crossover* ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure control issues* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 29 06:08:04 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 29 Jan 2013 06:08:04 -0800 Subject: [diffusion] Diffusion Morning Report 01/29/13 Message-ID: <5107D7C4.4010601@stanford.edu> Good Morning All, *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Epi pressure control,**Tylan 2 poor uniformity* *3. Resolved:***LTO N2 purge-reset MFS460, Tylan 2 rebuilt loader needs test -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 29 06:25:14 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 29 Jan 2013 06:25:14 -0800 Subject: [diffusion] Fwd: Diffusion Morning Report 01/29/13 In-Reply-To: <5107D7C4.4010601@stanford.edu> References: <5107D7C4.4010601@stanford.edu> Message-ID: <5107DBCA.1060400@stanford.edu> A bit light on Data -------- Original Message -------- Subject: Diffusion Morning Report 01/29/13 Date: Tue, 29 Jan 2013 06:08:04 -0800 From: Ted Berg To: labstaff at snf.stanford.edu, diffusion , John Bumgarner , John Shott , snf-labstaff at lists.stanford.edu, Ray Seymour , Brett Huff , Mary Tang , snf-furnaces at lists.stanford.edu, tberg Good Morning All, *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Epi pressure control,**Tylan 2 poor uniformity* *3. Resolved:***LTO N2 purge-reset MFS460, Tylan 2 rebuilt loader needs test Date: 1/29/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test* ** ** ** Tylan 2 *down* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *down* *needs test* *4.3/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure control issues* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 30 06:12:58 2013 From: tberg at stanford.edu (Ted Berg) Date: Wed, 30 Jan 2013 06:12:58 -0800 Subject: [diffusion] Diffusion Morning Report 1/30/13 Message-ID: <51092A6A.2000007@stanford.edu> Good Morning All, *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Epi pressure control chamber A,**Tylan 2 poor uniformity* *3. Resolved:**Slowly bringing up Epi Chamber B, did etch coat yesterday * Date: 1/30/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test* ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure control issues* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-pump replaced* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 31 06:21:27 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 31 Jan 2013 06:21:27 -0800 Subject: [diffusion] Diffusion Morning Report 01/31/13 Message-ID: <510A7DE7.2090500@stanford.edu> Good Morning All, *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * Thermco Nitride thick,*Tylan 3 thin,**Epi pressure control chamber A,**Tylan 2 poor uniformity* *3. Resolved:**Slowly bringing up Epi Chamber B, did more etch coats yesterday, Waiting Maurice for wafer tests * ** Date: 1/31/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test* ** ** ** Tylan 2 *down* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *tested after sih4 alarm,testing more* *28.5/30* ** ** Tylan 11-LTO *yellow* *needs test* *4.3/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *thick dep* ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *O2 in SiH4?testing-pressure control issues* ** ** *1* AMAT Epi Cham. B *down* *Applied doing final checkout-ran etches* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: