[diffusion] Diffusion Morning Report 06/04/13

Ted Berg tberg at stanford.edu
Tue Jun 4 06:02:38 PDT 2013


Good Morning All,
     Epi Pump should be back late Wed. or early Thursday. Backup pump is 
ordered no ETA.

Diffusion Morning ReportJune 4, 2013

*New Problems: None overnight*

*Ongoing:, AMAT Ch A Epi Pump dead out for repair --Looks like Wed.?,*

*Resolved: *

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham A*

	

Down

	

1

	

Pump dead out for repair

	

Replace after repair-Ordered Spare

*Tylan 1*

	

Yellow

	

	

thick

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element


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