[diffusion] Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Fri Jun 7 05:58:03 PDT 2013


Good Morning All, Ted is out today.

Diffusion Morning ReportJune 7, 2013

*Ongoing:, AMAT Ch A Epi Pump dead out for repair --Looks like Thursday 
or maybe Friday?,*

*AMAT ch B Epi faults after recipe ends*
**

*Resolved: *

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham A*

	

Down

	

1

	

Pump dead out for repair

	

Replace after repair-Ordered Spare

*Tylan 1*

	

Yellow

	

	

thick

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

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