[diffusion] Diffusion Morning Report 06/10/13

Ted Berg tberg at stanford.edu
Mon Jun 10 06:17:10 PDT 2013


Good Morning All,
     Epi A pump is back installing today.

Diffusion Morning ReportJune 10, 2013

*New Problems: Tylan 4 MFS alarms, Epi Scrubber fault*

*Ongoing:, Resolved: AMAT Ch A Epi Pump is back installing today*

*Resolved:*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham A*

	

Down

	

1

	

Pump dead back

	

Replaceing pump

*Tylan 1*

	

Yellow

	

	

thick

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element



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