[diffusion] Diffusion Morning Report 06/11/13

Ted Berg tberg at stanford.edu
Tue Jun 11 06:27:56 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 11, 2013

*New Problems: None overnight*

*Ongoing:*

*Resolved: Tylan 4 MFS alarms, Epi Scrubber fault, : AMAT Ch A Epi Pump 
is back installed yesterday*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

**

	

	

	

	

*Tylan 1*

	

Yellow

	

	

thick

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

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