[diffusion] Diffusion Morning Report 06/12/13

Ted Berg tberg at stanford.edu
Wed Jun 12 06:44:12 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 12, 2013

*New Problems: Epi Pressure deviation*

*Ongoing:*

*Resolved:Tylan 1 thickness OK, Epi Pressure deviation*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

**

	

	

	

	

*Tylan 1*

	

Up

	

	

Qual good

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

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