[diffusion] Diffusion Morning Report 06/13/13

Ted Berg tberg at stanford.edu
Thu Jun 13 06:21:41 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 13, 2013

*New Problems: Epi Pressure deviation*

*Ongoing:*

*Resolved:*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham A*

	

Yellow

	

1

	

Can't control low pressure

	

FS or pump change

*Tylan 1*

	

Up

	

	

Qual good

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

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