[diffusion] Diffusion Morning Report 06/14/13

Ted Berg tberg at stanford.edu
Fri Jun 14 06:36:35 PDT 2013


Good Morning All,
     The CL96 toxic gas monitor went into fault last night so several 
tools are shut down as a cautionary measure. These include: AMAT 
Epi2,HDCVD and CCP, Thermco Poly 1 and 2, Thermco and Tylan BPSG and  
STS Dep. Field service will be in this morning to investigate.

Diffusion Morning ReportJune 14, 2013

*New Problems: CL96 Fault*

*Ongoing:*

*Resolved: : Epi Pressure deviation*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham A*

	

Up

	

1

	

Pump issues resolved

	

FS

*Tylan 1*

	

Up

	

	

Qual good

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element


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