[diffusion] Diffusion Morning report 06/17/13

Ted Berg tberg at stanford.edu
Mon Jun 17 06:22:25 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 17, 2013

*New Problems: : Epi Pressure deviation *

*Ongoing:*

*Resolved: CL96 Fault resolved, Switched Epi pumps from A to B*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham B*

	

yellow

	

1

	

Pressure issues

	

Check pump

*Tylan 1*

	

Up

	

	

Qual good

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

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