[diffusion] Diffusion Morning Report 06/18/13

Ted Berg tberg at stanford.edu
Tue Jun 18 07:03:14 PDT 2013


Good Morning All,
     Epi Chamber B still having issues.

Diffusion Morning ReportJune 18, 2013

*New Problems: : Epi Pressure deviation Chamber B breaker tripped*

*Ongoing:*

*Resolved: *

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham B*

	

yellow

	

1

	

Pressure issues

	

Check pump

*Tylan 1*

	

Up

	

	

Qual good

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element


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