[diffusion] Diffusion Morning Report 06/21/13

Ted Berg tberg at stanford.edu
Fri Jun 21 06:26:23 PDT 2013


Good Morning All,
     Maurice is out today.

Diffusion Morning ReportJune 21, 2013

*New Problems: : Epi Pressure deviation ,Tylan 4 Flow issue*

*Ongoing: SEM 4160 tilt issue*

*Resolved: *

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham B*

	

yellow

	

1

	

Pressure issues

	

Changed Circuit Breaker

*SEM 4160*

	

Yellow

	

2

	

Tilt issues

	

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

*Tylan 4*

	

Down

	

2

	

Flow issue

	

Changing sensor

	

	

	

	


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