[diffusion] Diffusion Morning Report 06/24/13

Ted Berg tberg at stanford.edu
Mon Jun 24 06:17:08 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 24, 2013

*New Problems: : Epi HCl change,Tylan 2 no oxide, Tylan BPSG bad pump *

*Ongoing: SEM 4160 tilt issue*

*Resolved: ,Tylan 4 Flow issue*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi HCL*

	

yellow

	

1

	

changing HCl

	


*SEM 4160*

	

Yellow

	

3

	

Tilt issues

	

*Tylan 2*

	

Yellow

	

2

	

No oxide

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

*Tylan BPSG*

	

Down

	

2

	

Bad pump

	

change



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