[diffusion] Diffusion Morning Report 06/25/13

Ted Berg tberg at stanford.edu
Tue Jun 25 06:35:35 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 25, 2013

*New Problems: :AMAT Epi Pressure *

*Ongoing: SEM 4160 tilt issue, Tylan 2 no oxide,*

*Resolved: Epi HCl change, Tylan BPSG bad pumpreplaced*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham B*

	

Down

	

	

Pressure issues

	

Check out

*SEM 4160*

	

Yellow

	

	

Tilt issues

	

Check out-maybe FS

*Tylan 2*

	

Yellow

	

	

No oxide

	

Door close issue

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

*Tylan BPSG*

	

LEDs

	

	

	

change

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