[diffusion] Diffusion Morning Report 06/26/13

Ted Berg tberg at stanford.edu
Wed Jun 26 06:23:55 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 26, 2013

*New Problems: :AMAT Epi B Pressure , Epi B scrubber pump*

*Ongoing: SEM 4160 tilt issue, ,*

*Resolved: Tylan 2 no oxide-replaced loader board*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham B*

	

Down

	

1

	

Pressure issues , scrubber pump

	

Check out

*SEM 4160*

	

Yellow

	

2

	

Tilt issues

	

Check out-maybe FS

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

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