[diffusion] Diffusion Morning Report 06/28/13

Ted Berg tberg at stanford.edu
Fri Jun 28 06:14:56 PDT 2013


Good Morning All,

Diffusion Morning ReportJune 28, 2013

*New Problems: :AMAT Epi B Pressure , Amat Epi Chamber A SiH4 flow issue*

*Ongoing: SEM 4160 tilt issue, ,*

*Resolved:*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*AMAT Epi Cham B*

	

Down

	

1

	

Pressure issues ,

	

Pump out

*SEM 4160*

	

Yellow

	

2

	

Tilt issues

	

Check out-maybe FS

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco1*

	

Yellow

	

	

Thin

	

*Thermco BPSG*

	

Yellow

	

	

Front Zone low

	

Check element

*AMAT Epi Cham A*

	

Yellow

	

2

	

Si H4 flow issue

	

Checkout

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