From tberg at stanford.edu Fri Mar 1 06:13:56 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 01 Mar 2013 06:13:56 -0800 Subject: [diffusion] Diffusion Morning Report 03/01/13 Message-ID: <5130B7A4.6090408@stanford.edu> Good Morning All, *1**. New issues**:* None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride tested again waiting further instructions after alarms, *O2 in Silane on ?EPi, * EPI Chamber A *pump out for repair,**Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved:**Epi Chamber B running Fine * Date: 3/1/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *for anneals* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *pump out for repair-hopefully back today* ** ** *1* AMAT Epi Cham. B *yellow* *testing* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 4 06:18:56 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 04 Mar 2013 06:18:56 -0800 Subject: [diffusion] Diffusion Morning Report 03/04/13 Message-ID: <5134AD50.4050102@stanford.edu> Good Morning All, *1**. New issues**:* Tylan Nitride high base failed leak, Tylan LTO boat fork missing sheath * 2. Ongoing issues:*Tylan Poly rewriting recipes,*****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved:**Epi Chambers A and B running Fine,TEL transfer issue OK * ** Date: 3/4/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *down* *high base failed leak* *28.5/30* ** * 1* Tylan 11-LTO *yellow* *missing boat fork sheath* *4.3/30* ** * 2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* *pump replaced -running* ** ** ** AMAT Epi Cham. B *up* *running* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 5 06:49:52 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 05 Mar 2013 06:49:52 -0800 Subject: [diffusion] Diffusion Morning Report 03/05/13 Message-ID: <51360610.3040101@stanford.edu> Good Morning All, *1**. New issues**:* Black stuff on Tylan LTO boat * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: Tylan Nitride pump changed, Tylan boat fork sheath replaced * Date: 3/5/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 *yellow* *needs test* ** ** Tylan 3 *yellow* *thin?* ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** Tylan 6-POCl3 *up* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** Tylan 10-Nitride *yellow* *pump replaced -running needs test* *28.5/30* ** Tylan 11-LTO *yellow* *sheath replaced-black stuff on boats* *4.3/30* ** 1 Tylan 12-FGA *up* ** ** ** Thermco 1 *yellow* *thin?* ** ** Thermco 2 *up* ** ** ** Thermco 3 *up* ** ** ** Thermco4 *up* ** ** ** Thermco Poly1 *up* ** ** * * Thermco Poly2 *up* ** ** ** Thermco Nitride1 *up* ** ** ** Thermco bpsg *up* ** ** ** AMAT Epi Cham. A *up* *pump replaced -running* ** ** AMAT Epi Cham. B *up* *running* ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** SEM 4160 *up* ** ** ** FGA2 *up* ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Mar 6 08:58:03 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 06 Mar 2013 08:58:03 -0800 Subject: [diffusion] Diffusion Morning Report Message-ID: <5137759B.5070504@stanford.edu> Good Morning All, Ted is out today. *1**. New issues**:* HCL cylinder needs to be changed. * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: * Date: 3/6/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 *yellow* *needs test* ** ** Tylan 3 *yellow* *thin?* ** ** Tylan 4 *up* ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** Tylan 6-POCl3 *up* ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** Tylan 10-Nitride *yellow* *pump replaced -running needs test* *28.5/30* ** Tylan 11-LTO *yellow* *4.3/30* ** 1 Tylan 12-FGA *up* ** ** ** Thermco 1 *yellow* *thin?* ** ** Thermco 2 *up* ** ** ** Thermco 3 *up* ** ** ** Thermco4 *up* ** ** ** Thermco Poly1 *up* ** ** * * Thermco Poly2 *up* ** ** ** Thermco Nitride1 *up* ** ** ** Thermco bpsg *up* ** ** ** AMAT Epi Cham. A *up* *pump replaced -running* ** ** AMAT Epi Cham. B *up* *running* ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** SEM 4160 *up* ** ** ** FGA2 *up* ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 7 06:06:43 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Mar 2013 06:06:43 -0800 Subject: [diffusion] Diffusion Morning Report 03/07/13 Message-ID: <51389EF3.5010906@stanford.edu> Good Morning All, *1**. New issues**:*Thermco Poly 2 low temp, Thermco 3 loader hitting shroud * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: HCl for Epi changed * Date: 3/7/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *yellow* *pump replaced -running needs test* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *yellow* *loader hitting shroud* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *down* *temp too low* ** ** * 1* Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* *HCl replaced* ** ** ** AMAT Epi Cham. B *up* *HCl replaced* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 8 06:09:33 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Mar 2013 06:09:33 -0800 Subject: [diffusion] Diffusion Morning Report 03/08/13 Message-ID: <5139F11D.1050107@stanford.edu> Good Morning All, *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: *Thermco Poly 2 low temp-Reset CB, Thermco 3 loader hitting shroud-Adjusted, FGA cylinders changed Date: 3/8/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *up* *several users no issues* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ***shroud adjusted* ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* *needs test-breaker reset at temp* ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 11 06:15:42 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Mar 2013 06:15:42 -0700 Subject: [diffusion] Diffusion Morning Report 03/11/13 Message-ID: <513DD8FE.10006@stanford.edu> Good Morning All, *1**. New issues**:*Epi HCL is empty-just changed Wed. of last week-on order * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: * Date: 3/11/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *up* *several users no issues* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* *needs test-breaker reset at temp* ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *no HCL* ** ** * 1* AMAT Epi Cham. B *down* *no HCL* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 12 06:05:35 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Mar 2013 06:05:35 -0700 Subject: [diffusion] Diffusion Morning Report 03/12/13 Message-ID: <513F281F.2080909@stanford.edu> Good Morning All, *1**. New issues**:*Epi HCL is being replaced this morning * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: * Date: 3/12/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *up* *several users no issues* *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *down* *replacing HCl* ** ** ** AMAT Epi Cham. B *down* *replacing HCl* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 13 06:24:12 2013 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 Mar 2013 06:24:12 -0700 Subject: [diffusion] Diffusion Morning Report 03/13/13 Message-ID: <51407DFC.1030207@stanford.edu> Good Morning All, *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved:HCL for Epi replaced. Someone had changed the recipes to 25 minute etches from 5. Replaced backlight lamps on all Thermco furnaces * Date: 3/13/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* *several users no problem* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* *replaced HCl* ** ** ** AMAT Epi Cham. B *up* *replaced HCl* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 14 06:15:39 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Mar 2013 06:15:39 -0700 Subject: [diffusion] Diffusion morning Report 03/14/13 Message-ID: <5141CD7B.9030600@stanford.edu> Good Morning All, *1**. New issues**:*None overnight * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: * Date: 3/14/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* *several users no problem* *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 15 06:23:45 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 15 Mar 2013 06:23:45 -0700 Subject: [diffusion] Diffusion Morning Report 03/15/13 Message-ID: <514320E1.1050104@stanford.edu> Good Morning All, *1**. New issues**:*Epi Possible Haze on wafer * 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: * Date: 3/15/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 8-SiGe *down* *waiting for users* *3.4/30* ** ** Tylan 9-Poly *down* *rewriting recipes-testing revised recipes* *23.7/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* *possible haze* ** ** ** AMAT Epi Cham. B *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 18 06:46:36 2013 From: tberg at stanford.edu (Ted Berg) Date: Mon, 18 Mar 2013 06:46:36 -0700 Subject: [diffusion] Diffusion Morning Report 03/18/13 Message-ID: <51471ABC.2000008@stanford.edu> Good Morning All, *1**. New issues**:*Epi Possible pressure issue * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: * ** Date: 3/18/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *thin?* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *yellow* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *yellow* *pressure* ** ** ** AMAT Epi Cham. B *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 19 06:27:37 2013 From: tberg at stanford.edu (Ted Berg) Date: Tue, 19 Mar 2013 06:27:37 -0700 Subject: [diffusion] Diffusion Morning Report 03/19/13 Message-ID: <514867C9.60705@stanford.edu> Good Morning All, *1**. New issues**:*Epi Chamber B scrubber pump dead * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues? *3. Resolved: Pressure issue on Epi chamber A * Date: 3/19/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* *scrubber pump is dead* ** ** * 1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 20 06:18:06 2013 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Mar 2013 06:18:06 -0700 Subject: [diffusion] Diffusion Morning Report 03/20/13 Message-ID: <5149B70E.80806@stanford.edu> Good Morning All, *1**. New issues**:* * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Epi Chamber B scrubber pump dead *3. Resolved:Tylan1 I/O issue resolved * Date: 3/20/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *thick* ** ** ** Tylan 2 *yellow* *needs test* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* *scrubber pump is dead-researching replacement* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 21 06:42:57 2013 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Mar 2013 06:42:57 -0700 Subject: [diffusion] Diffusion Morning Report 03/21/13 Message-ID: <514B0E61.1010307@stanford.edu> Good Morning All, *1**. New issues**:* * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Tylan 1 thick *3. Resolved:Epi B scrubber pump rebuilt-installing * Date: 3/21/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *thick* ** ** ** Tylan 2 *yellow* *poor uniformity* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *down* *Pump rebuilt-reinstalling this morning* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 22 06:13:24 2013 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 Mar 2013 06:13:24 -0700 Subject: [diffusion] Diffusion Morning Report 03/22/13 Message-ID: <514C58F4.10900@stanford.edu> Good Morning All, *1**. New issues**:*Changing HCL for Epi * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Tylan 1 thick *3. Resolved:Epi B scrubber pump installed and working fine * Diffusion Morning Report Date: 3/21/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 yellow thick Tylan 2 yellow poor uniformity Tylan 3 yellow thin? Tylan 4 up Tylan 5-BBr3 yellow temp issue-front zone low Tylan 6-POCl3 up Tylan 7-TEOS2 up 14.39/30 Tylan 10-Nitride up 28.5/30 Tylan 11-LTO yellow 4.3/30 Tylan 12-FGA up Thermco 1 yellow thin? Thermco 2 up Thermco 3 up Thermco4 up Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg up AMAT Epi Cham. A down HCL Change 1 AMAT Epi Cham. B down HCL Change TEL Spa up Burn Box up SEM 4160 up FGA2 up SiH4 for furnaces on crossover ok changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Mar 25 09:38:12 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 25 Mar 2013 09:38:12 -0700 Subject: [diffusion] Diffusion Morning Report Message-ID: <51507D74.4000301@stanford.edu> Good Morning All, *1**. New issues**:* no new issues over the weekend. * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Tylan 1 thick *3. Resolved: EPI B scrubber pump * Date: 3/25/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *thick* ** ** ** Tylan 2 *yellow* *poor uniformity* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *up* ** ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Mar 26 06:06:27 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 26 Mar 2013 06:06:27 -0700 Subject: [diffusion] Diffusion Morning Report Message-ID: <51519D53.8080803@stanford.edu> Good Morning All, Ted is out today *1**. New issues**:* Tycom can't read disks all tubes doiwn * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Tylan 1 thick *3. Resolved: * Date: 3/26/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *thick* ** ** ** Tylan 2 *yellow* *poor uniformity* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *up* ** *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *up* ** ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Mar 27 06:18:09 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 27 Mar 2013 06:18:09 -0700 Subject: [diffusion] Diffusion Morning Report Message-ID: <5152F191.4020908@stanford.edu> Good Morning All, Ted is out today *1**. New issues**:* Thermco BPSG front zone low * 2. Ongoing issues:**Tycom down, **Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Tylan 1 thick *3. Resolved: * Date: 3/27/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *thick* ** ** ** Tylan 2 *down* *poor uniformity* ** ** ** Tylan 3 *down* *thin?* ** ** ** Tylan 4 *down* ** ** ** ** Tylan 5-BBr3 *down** * *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *down* ** ** ** ** Tylan 7-TEOS2 *down* ** *14.39/30* ** ** Tylan 10-Nitride *down* ** *28.5/30* ** ** Tylan 11-LTO *down* ** *4.3/30* ** ** Tylan 12-FGA *down* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *Yellow* * front zone temp low * ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *up* ** ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Wed Mar 27 09:09:28 2013 From: shott at stanford.edu (John Shott) Date: Wed, 27 Mar 2013 09:09:28 -0700 Subject: [diffusion] Diffusion Morning Report In-Reply-To: <51519D53.8080803@stanford.edu> References: <51519D53.8080803@stanford.edu> Message-ID: <515319B8.1070000@stanford.edu> Ray: As swapping boards didn't seem to help, it seems as if it is likely that it is a problem with the 5 1/4" floppy drive itself. Do we happen to have a spare (and hopefully working) drive that we could put in? What happens when a disk is inserted into the drive? Do you hear a bunch of "clicking" from the heads moving in an out? That will often happen if the mechanism that drives the heads from the outer track to the inner track has a sticky spot for some reason and can't get all of the way to the inner tracks. In the past, I've had modest success with repairing this on some old drives. If you'd like any help with this, let me know. John On 3/26/2013 6:06 AM, Ray Seymour wrote: > Good Morning All, > Ted is out today > *1**. New issues**:* Tycom can't read disks all tubes doiwn > * 2. Ongoing issues:****Tylan 3 thin,**Tylan 2 poor uniformity*, > Thermco 1 thickness issues?Tylan 1 thick > *3. Resolved: * > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Mar 28 06:12:07 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 28 Mar 2013 06:12:07 -0700 Subject: [diffusion] Diffusion Morning Report Message-ID: <515441A7.30801@stanford.edu> Good Morning All, Ted is out today *1**. New issues**:* DCS off due to chiller pump failure on recirc. * 2. Ongoing issues:**Thermco BPSG front zone temp,**Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Tylan 1 thick *3. Resolved: *Tylan Tycom disk problem Date: 3/28/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *thick* ** ** ** Tylan 2 *yellow* *poor uniformity* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *down* * DCS off * *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* * DCS off * ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *problem* DCS off ** ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Mar 29 06:10:56 2013 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 29 Mar 2013 06:10:56 -0700 Subject: [diffusion] Diffusion Morning Report Message-ID: <515592E0.8000706@stanford.edu> Good Morning All, Ted is out today *1**. New issues**:* * 2. Ongoing issues:**Thermco BPSG front zone temp,**Tylan 3 thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?Tylan 1 thick *3. Resolved: *DCS Chiller Date: 3/29/13 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *thick* ** ** ** Tylan 2 *yellow* *poor uniformity* ** ** ** Tylan 3 *yellow* *thin?* ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *yellow* *temp issue-front zone low* ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *14.39/30* ** ** Tylan 10-Nitride *down* * DCS off * *28.5/30* ** ** Tylan 11-LTO *yellow* ** *4.3/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *yellow* *thin?* ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *up* ** ** ** ** Thermco4 *up* ** ** ** ** Thermco Poly1 *up* ** ** * * ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* * DCS off * ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi Cham. A *up* ** ** ** ** AMAT Epi Cham. B *problem* DCS off ** ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** ** SEM 4160 *up* ** ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces *on* *crossover ok* ***changeover working well*** ** ** _______________________________________________ snf-furnaces mailing list snf-furnaces at lists.stanford.edu https://mailman.stanford.edu/mailman/listinfo/snf-furnaces -------------- next part -------------- An HTML attachment was scrubbed... URL: