[diffusion] Diffusion Morning Report 03/04/13

Ted Berg tberg at stanford.edu
Mon Mar 4 06:18:56 PST 2013


Good Morning All,
*1**. New issues**:* Tylan Nitride high base failed leak, Tylan LTO boat 
fork missing sheath
* 2. Ongoing issues:*Tylan Poly rewriting recipes,*****Tylan 3 
thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?
*3. Resolved:**Epi Chambers A and  B running Fine,TEL transfer issue OK

*
**
					
	Date: 	3/4/13 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*yellow* 	*needs test* 	** 	** 	**
Tylan 3 	*yellow* 	*thin?* 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*yellow* 	*temp issue-front zone low* 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*yellow* 	*needs test* 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes-testing revised recipes* 
*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*high base failed leak* 	*28.5/30* 	** 	* 1*
Tylan 11-LTO 	*yellow* 	*missing boat fork sheath* 	*4.3/30* 	** 	* 2*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*yellow* 	*thin?* 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*up* 	** 	** 	** 	**
Thermco4 	*up* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*up* 	*pump replaced -running* 	** 	** 	**
AMAT Epi Cham. B 	*up* 	*running* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working 
well*** 	** 	**

*
*
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