[diffusion] Diffusion Morning Report 03/05/13

Ted Berg tberg at stanford.edu
Tue Mar 5 06:49:52 PST 2013


Good Morning All,
*1**. New issues**:* Black stuff on Tylan LTO boat
* 2. Ongoing issues:*Tylan Poly rewriting recipes,***Tylan 3 
thin,**Tylan 2 poor uniformity*, Thermco 1 thickness issues?
*3. Resolved: Tylan Nitride pump changed, Tylan boat fork sheath replaced

*
					
	Date: 	3/5/13 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	up 				
Tylan 2 	*yellow* 	*needs test* 	** 	** 	
Tylan 3 	*yellow* 	*thin?* 	** 	** 	
Tylan 4 	*up* 	** 	** 	** 	
Tylan 5-BBr3 	*yellow* 	*temp issue-front zone low* 	** 	** 	
Tylan 6-POCl3 	*up* 	** 	** 	** 	
Tylan 7-TEOS2 	*yellow* 	*needs test* 	*14.39/30* 	** 	
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	
Tylan 9-Poly 	*down* 	*rewriting recipes-testing revised recipes* 
*23.7/30* 	** 	
Tylan 10-Nitride 	*yellow* 	*pump replaced -running needs test* 
*28.5/30* 	** 	
Tylan 11-LTO 	*yellow* 	*sheath replaced-black stuff on boats* 
*4.3/30* 	** 	1
Tylan 12-FGA 	*up* 	** 	** 	** 	
Thermco 1 	*yellow* 	*thin?* 	** 	** 	
Thermco 2 	*up* 	** 	** 	** 	
Thermco 3 	*up* 	** 	** 	** 	
Thermco4 	*up* 	** 	** 	** 	
Thermco Poly1 	*up* 	** 	** 	*
* 	
Thermco Poly2 	*up* 	** 	** 	** 	
Thermco Nitride1 	*up* 	** 	** 	** 	
Thermco bpsg 	*up* 	** 	** 	** 	
AMAT Epi Cham. A 	*up* 	*pump replaced -running* 	** 	** 	
AMAT Epi Cham. B 	*up* 	*running* 	** 	** 	
TEL Spa 	*up* 	** 	** 	** 	
Burn Box 	*up* 	** 	** 	** 	
SEM 4160 	*up* 	** 	** 	** 	
FGA2 	*up* 	** 	** 	** 	
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working well*** 	** 	

**
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