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Diffusion                  
Date:                       
3/21/2005
<br>Tube Name/Number Status                       
Comments                           
THICKNESS-Change at
<br>Tylan 1                    
Up
<br>Tylan 2                    
Up
<br>Tylan 3                    
Up
<br>Tylan 4                    
Up
<br>Tylan 5-BBr3           
Up
<br>Tylan 6-POCl3         
Up
<br>Tylan 7-TEOS2         down                         
<b>Qual testing</b>
<br>Tylan 8-SiGe            
Up                                                                          <b> 
2.58/30</b>
<br>Tylan 9-Poly             
Up                                                                           <b>
1.99/30</b>
<br>Tylan 10-Nitride        Up                                                                          <b> 
26.3/30</b>
<br>Tylan 11-BPSG-LTOUp                                                                           <b>
1.35/30</b>
<br>Tylan 12-FGA          
Up
<br>Tystar                      
Up                                                                         <b>  
7.9/30</b>
<br>Doped Poly              
GONE
<br>TEOS                      
Up
<br>Tylan 16                   
N/A
<br>Yhermco 1               
UP
<br>Thermco 1               
UP
<br>Thermco Poly          
Yellow                          <b>
testing doped</b>
<br>Thermco Nitride        Down                           <b>
Waiting</b>
<p>Burn Box Up
<br> 
<br>ZYGO                     
Up
<p>GAAS 22                
UP
<br>GAAS 23                
UP<b></b>
<p><b>SiH4 for furnaces                                     
Auto changeover working well  B on line 640 PSI</b>
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