From latta at snf.stanford.edu Tue Apr 10 11:48:19 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 10, 2001 11:48:19 AM Subject: Shutdown drytek2 2001-04-10 11:48:18: Program stops after 1:00, error 005. Message-ID: From booth at snf.stanford.edu Tue Apr 10 01:40:32 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 10, 2001 1:40:32 PM Subject: Shutdown drytek2 2001-04-10 11:48:18: Program stops after 1:00, error 005. Message-ID: Someone had left the Time/Laser switch in the "Laser" position. Error 005 indicates a failure to detect endpoint. Reset swtich to "Time" for process #2, and system works properly. From mbadi at snf.stanford.edu Wed Apr 18 12:26:45 2001 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Apr 18, 2001 12:26:45 AM Subject: Problem drytek2 2001-04-18 00:26:44: During my Poly Etch the Plasma on the fourth tray (from the top) disappeared and did not come back. Result: my wafer that was on that try did not etch. Message-ID: From booth at snf.stanford.edu Wed Apr 18 07:47:06 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 18, 2001 7:47:06 AM Subject: Shutdown drytek2 2001-04-18 07:47:05: RF power fault Message-ID: mbadi reported plasma going out & reflected RF power suddenly getting high during etch. From booth at snf.stanford.edu Thu Apr 19 08:01:18 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 19, 2001 8:01:18 AM Subject: Problem drytek2 2001-04-18 00:26:44: During my Poly Etch the Plasma on the fourth tray (from the top) disappeared and did not come back. Result: my wafer that was on that try did not etch. Message-ID: this should have been written up as a shutdown. From booth at snf.stanford.edu Thu Apr 19 08:03:00 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 19, 2001 8:03:00 AM Subject: Shutdown drytek2 2001-04-18 07:47:05: RF power fault Message-ID: tightened RF connections in matching unit. Ran plasma for 1/2 hours with no sign of unstable reflected power - looks OK. From booth at snf.stanford.edu Thu Apr 19 11:10:43 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 19, 2001 11:10:43 AM Subject: Shutdown drytek2 2001-04-19 11:10:41: intermittant high reflected power Message-ID: From booth at snf.stanford.edu Fri Apr 20 01:42:22 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 20, 2001 1:42:22 PM Subject: Shutdown drytek2 2001-04-19 11:10:41: intermittant high reflected power Message-ID: Checked for loose connections. Ran O2-descum for 30 min - OK. Ran poly etch for 20 min - OK.