Problem drytek2 2001-04-18 00:26:44: During my Poly Etch the Plasma on the fourth tray (from the top) disappeared and did not come back. Result: my wafer that was on that try did not etch.

mbadi at snf.stanford.edu mbadi at snf.stanford.edu
Wed Apr 18 12:26:45 PDT 2001

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