Problem drytek2 2001-04-18 00:26:44: During my Poly Etch the Plasma on the fourth tray (from the top) disappeared and did not come back. Result: my wafer that was on that try did not etch.

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Apr 19 08:01:18 PDT 2001


this should have been written up as a shutdown.




More information about the drytek2-pcs mailing list