Shutdown drytek2 2001-04-18 07:47:05: RF power fault

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Apr 19 08:03:00 PDT 2001

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tightened RF connections in matching unit.
Ran plasma for 1/2 hours with no sign of
unstable reflected power - looks OK.

Previous message: Shutdown drytek2 2001-04-18 07:47:05: RF power fault
Next message: Problem drytek2 2001-04-18 00:26:44: During my Poly Etch the Plasma on the fourth tray (from the top) disappeared and did not come back. Result: my wafer that was on that try did not etch.
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