April 2001 Archives by date

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Starting: Tue Apr 10 01:40:32 PDT 2001
Ending: Fri Apr 20 01:42:22 PDT 2001
Messages: 8

• Shutdown drytek2 2001-04-10 11:48:18: Program stops after 1:00, error 005.   booth at snf.stanford.edu
• Shutdown drytek2 2001-04-10 11:48:18: Program stops after 1:00, error 005.   latta at snf.stanford.edu
• Shutdown drytek2 2001-04-18 07:47:05: RF power fault   booth at snf.stanford.edu
• Problem drytek2 2001-04-18 00:26:44: During my Poly Etch the Plasma on the fourth tray (from the top) disappeared and did not come back. Result: my wafer that was on that try did not etch.   mbadi at snf.stanford.edu
• Problem drytek2 2001-04-18 00:26:44: During my Poly Etch the Plasma on the fourth tray (from the top) disappeared and did not come back. Result: my wafer that was on that try did not etch.   booth at snf.stanford.edu
• Shutdown drytek2 2001-04-18 07:47:05: RF power fault   booth at snf.stanford.edu
• Shutdown drytek2 2001-04-19 11:10:41: intermittant high reflected power   booth at snf.stanford.edu
• Shutdown drytek2 2001-04-19 11:10:41: intermittant high reflected power   booth at snf.stanford.edu

Last message date: Fri Apr 20 01:42:22 PDT 2001
Archived on: Fri Jan 11 13:04:59 PST 2013

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