From caudillo at snf.stanford.edu Wed Aug 1 11:21:53 2001 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Aug 1, 2001 11:21:53 PM Subject: Problem drytek2 2001-08-01 23:21:51: 4th load platform needs adj Message-ID: Someone has moved one of the teflon pins on the 4th platform from the top. From booth at snf.stanford.edu Thu Aug 2 07:52:18 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 2, 2001 7:52:18 AM Subject: Problem drytek2 2001-08-01 23:21:51: 4th load platform needs adj Message-ID: done. From aaronp at snf.stanford.edu Thu Aug 2 07:15:08 2001 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Aug 2, 2001 7:15:08 PM Subject: Problem drytek2 2001-08-02 19:15:05: electrode 3 has no plasma Message-ID: running process 2 (poly etch) center electrode (3 up from bottom) dropped plasma part way through etch. rest of electrodes continued to function. power and reflected power looked normal. From booth at snf.stanford.edu Mon Aug 6 06:44:55 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 6, 2001 6:44:55 AM Subject: Problem drytek2 2001-08-02 19:15:05: electrode 3 has no plasma Message-ID: could not reproduce the problem. From cbaxter at snf.stanford.edu Wed Aug 8 04:41:02 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 8, 2001 4:41:02 PM Subject: Shutdown drytek2 2001-08-08 16:41:01: need to change oil and filter Message-ID: From cbaxter at snf.stanford.edu Wed Aug 8 06:46:46 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 8, 2001 6:46:46 PM Subject: Shutdown drytek2 2001-08-08 16:41:01: need to change oil and filter Message-ID: completed oil and filter changed From hector at snf.stanford.edu Fri Aug 10 02:36:20 2001 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Aug 10, 2001 2:36:20 AM Subject: Problem drytek2 2001-08-10 02:36:19: intermittent plasma on 4 Message-ID: From cbaxter at snf.stanford.edu Fri Aug 10 02:33:09 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 10, 2001 2:33:09 PM Subject: Problem drytek2 2001-08-10 02:36:19: intermittent plasma on 4 Message-ID: found lose connection on rf connection on tray#4. also changed etched view window. From booth at snf.stanford.edu Mon Aug 20 07:38:30 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 20, 2001 7:38:30 AM Subject: Shutdown drytek2 2001-08-20 07:38:29: NO electrode cooling water flow. Message-ID: From booth at snf.stanford.edu Mon Aug 20 10:59:07 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 20, 2001 10:59:07 AM Subject: Shutdown drytek2 2001-08-20 07:38:29: NO electrode cooling water flow. Message-ID: replaced fuse in chiller & cleared out debris from electrode cooling passages. From mbartsch at snf.stanford.edu Wed Aug 22 02:04:17 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Aug 22, 2001 2:04:17 PM Subject: Problem drytek2 2001-08-22 14:04:16: no plasma, process 2 Message-ID: Was unable to get the plasma started running process 2 for anisotropic poly etch. The etch seemed to work fine using process 3. From cbaxter at snf.stanford.edu Wed Aug 22 02:57:39 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 22, 2001 2:57:39 PM Subject: Problem drytek2 2001-08-22 14:04:16: no plasma, process 2 Message-ID: process 2 is working fine. plasma strike ok. From rcrane at snf.stanford.edu Sat Aug 25 07:44:34 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Aug 25, 2001 7:44:34 AM Subject: Shutdown drytek2 2001-08-25 07:44:33: facility Message-ID: From rcrane at snf.stanford.edu Sat Aug 25 04:28:19 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Aug 25, 2001 4:28:19 PM Subject: Shutdown drytek2 2001-08-25 07:44:33: facility Message-ID: exhaust is up From hphan at snf.stanford.edu Tue Aug 28 10:46:49 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 28, 2001 10:46:49 AM Subject: Comment drytek2 2001-08-28 10:46:49: Treflon Pegs Message-ID: From hphan at snf.stanford.edu Tue Aug 28 10:48:07 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 28, 2001 10:48:07 AM Subject: Problem drytek2 2001-08-28 10:48:05: Teflon Pegs Message-ID: From cbaxter at snf.stanford.edu Tue Aug 28 12:53:37 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 28, 2001 12:53:37 PM Subject: Problem drytek2 2001-08-28 10:48:05: Teflon Pegs Message-ID: installed teflon pins(4) From pzwahlen at snf.stanford.edu Tue Aug 28 01:47:28 2001 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Aug 28, 2001 1:47:28 PM Subject: Problem drytek2 2001-08-28 13:47:26: Unstable O2 plasma Message-ID: Reflected power is jumping randomly causing the plasma to turn on and off. From cbaxter at snf.stanford.edu Tue Aug 28 02:41:01 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 28, 2001 2:41:01 PM Subject: Problem drytek2 2001-08-28 13:47:26: Unstable O2 plasma Message-ID: manually tuned rf match