From lindaw at snf.stanford.edu Wed Feb 7 01:13:17 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 7, 2001 1:13:17 PM Subject: Problem drytek2 2001-02-07 13:13:16: Pin placement issues Message-ID: Some inconsiderate person keeps moving the pins around on the electrodes such that 4 inch wafers will not fit. 3rd shelf down, the front right pin will not go into the 4 inch position, like it is plugged or something. From cbaxter at snf.stanford.edu Wed Feb 7 04:45:02 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 7, 2001 4:45:02 PM Subject: Problem drytek2 2001-02-07 13:13:16: Pin placement issues Message-ID: put pins on right location and installed one each on tray 3 and 4.. From zhang at snf.stanford.edu Thu Feb 8 01:37:51 2001 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 8, 2001 1:37:51 PM Subject: Shutdown drytek2 2001-02-08 13:37:51: Message-ID: From cbaxter at snf.stanford.edu Thu Feb 8 08:53:31 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 8, 2001 8:53:31 PM Subject: Shutdown drytek2 2001-02-08 13:37:51: Message-ID: check system out and try to cycle using recipe#1 O2 gas was not turning on, no flow check other gases the same thing, check manual found cycle hold was enable light bulb was burned out release cycle hold and gase are turning on now. i don't know if this was the reason for the shutdown. i cycle the system using recipe #1,2 and 3 without a problem and able tune to 0 reflective on all 3 recipe. From ericp at snf.stanford.edu Mon Feb 12 11:39:51 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Feb 12, 2001 11:39:51 AM Subject: Problem drytek2 2001-02-12 11:39:50: plasma changing color Message-ID: I've experienced several strange etches: Last week, in the middle of an etch (nitride etch), the plasma changed color (at about 6 minutes), from a normal "purple" to a brownish color. This was sudden. Restarting the machine cleared the problem. I ran it again on the weekend andexperienced the same behavior. I ran a long O2 descum on it Saturday. Problem not seen since, but users should watch plasma carefully for critical etches. When this occured, the only visible symptoms were plasma color change and reflected power jump. Gas flows and pressure indicated steady and correct. From ericp at snf.stanford.edu Mon Feb 12 11:43:37 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Feb 12, 2001 11:43:37 AM Subject: Problem drytek2 2001-02-12 11:43:35: standby self aborts Message-ID: Over the weekend, I ran a long O2 descum, and I distinctly remember putting the machine into standby and listening for the pumpdown. The next user came to me the next day, asking if I had put into standby. I said yes, and he wondered if the chamber had been vented overnight. We put the machine into standby, and he noticed it jump out of standby again. (??) glitch? From booth at snf.stanford.edu Mon Feb 12 04:00:45 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 12, 2001 4:00:45 PM Subject: Problem drytek2 2001-02-12 11:39:50: plasma changing color Message-ID: tightened loose process gas inlet fitting at door flex line. From booth at snf.stanford.edu Mon Feb 12 04:01:35 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 12, 2001 4:01:35 PM Subject: Problem drytek2 2001-02-12 11:43:35: standby self aborts Message-ID: Moved CPU board to center slot in card cage for better cooling. From zhang at snf.stanford.edu Tue Feb 13 01:04:45 2001 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 13, 2001 1:04:45 PM Subject: Shutdown drytek2 2001-02-13 13:04:43: reflected RF power jumps high during nitride etch Message-ID: nitride etch process #3 SF6 50 CF3Br 33 O2 off pressure 200 power 500 During etching, reflected power suddenly jumped high (from 20 to 240 or so). This happened for 4-5 times, each time shortly after forward power came on. Whenever this happened,the plasma would turn from orignal light purple to yellowish and the plasma for the 4th tray from the top would go off. From cbaxter at snf.stanford.edu Tue Feb 13 06:48:52 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 13, 2001 6:48:52 PM Subject: Shutdown drytek2 2001-02-13 13:04:43: reflected RF power jumps high during nitride etch Message-ID: found rf source to center cathode was loose tighten 6/32 screw and ran recipe #2 using sf6 and cf3br gases and ran it for 15mins 2x was able to tune to 0 ref. forward power was stable @500watts. i also ran recipe#1 using o2 gas... From chion at snf.stanford.edu Thu Feb 15 01:07:15 2001 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Feb 15, 2001 1:07:15 PM Subject: Problem drytek2 2001-02-15 13:07:14: A missing tip at the back of the 2nd slot. Message-ID: Counting from the top, in the 2nd wafer slot, there's a missing tip at the back. Please avoid using that slot. From zhang at snf.stanford.edu Thu Feb 15 07:08:35 2001 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 15, 2001 7:08:35 PM Subject: Problem drytek2 2001-02-15 19:08:34: inner-right tip missing on the 3rd tray from the top Message-ID: On the 3rd tray from the top, the inner-right tip became missing. From cbaxter at snf.stanford.edu Thu Feb 15 07:11:34 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 15, 2001 7:11:34 PM Subject: Shutdown drytek2 2001-02-15 19:11:32: down for change oil and filter Message-ID: From cbaxter at snf.stanford.edu Thu Feb 15 08:43:42 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 15, 2001 8:43:42 PM Subject: Shutdown drytek2 2001-02-15 19:11:32: down for change oil and filter Message-ID: oil and filter changed completed From cbaxter at snf.stanford.edu Thu Feb 15 08:44:08 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 15, 2001 8:44:08 PM Subject: Problem drytek2 2001-02-15 19:08:34: inner-right tip missing on the 3rd tray from the top Message-ID: installed guilde teflon tip From cbaxter at snf.stanford.edu Thu Feb 15 08:44:25 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 15, 2001 8:44:25 PM Subject: Problem drytek2 2001-02-15 13:07:14: A missing tip at the back of the 2nd slot. Message-ID: installed new teflon tip From zhang at snf.stanford.edu Fri Feb 16 12:26:37 2001 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 16, 2001 12:26:37 PM Subject: Problem drytek2 2001-02-16 12:26:36: forward power reads E16 at the end of process Message-ID: At the end of a series of nitride etch processes, forward RF power reads E16. From hansen at snf.stanford.edu Sat Feb 17 06:58:34 2001 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Feb 17, 2001 6:58:34 PM Subject: Problem drytek2 2001-02-17 18:58:33: Load Complete Light Remains On Message-ID: The load complete light appears to remain lit even after the chamber has vented. The light does not go off again until microreset is pressed. From cbaxter at snf.stanford.edu Tue Feb 20 05:48:27 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 20, 2001 5:48:27 PM Subject: Problem drytek2 2001-02-17 18:58:33: Load Complete Light Remains On Message-ID: load light will not effect system function, just push microreset it should be fine.. From cbaxter at snf.stanford.edu Tue Feb 20 05:50:01 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 20, 2001 5:50:01 PM Subject: Problem drytek2 2001-02-16 12:26:36: forward power reads E16 at the end of process Message-ID: e16 error mean's chamber not vented. adjusrted atm switch and cycle system . no e16 error encountered. From zhang at snf.stanford.edu Wed Feb 21 10:20:06 2001 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 21, 2001 10:20:06 AM Subject: Problem drytek2 2001-02-21 10:20:04: inner-right pin on 3rd tray (from top) missing Message-ID: From zhang at snf.stanford.edu Wed Feb 21 01:36:33 2001 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 21, 2001 1:36:33 PM Subject: Problem drytek2 2001-02-21 13:36:33: forward power reads E16 at the end of each process Message-ID: From cbaxter at snf.stanford.edu Wed Feb 21 05:17:05 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 21, 2001 5:17:05 PM Subject: Problem drytek2 2001-02-21 13:36:33: forward power reads E16 at the end of each process Message-ID: watched system vented did not encountered E16 error. From cbaxter at snf.stanford.edu Wed Feb 21 05:17:31 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 21, 2001 5:17:31 PM Subject: Problem drytek2 2001-02-21 10:20:04: inner-right pin on 3rd tray (from top) missing Message-ID: installed new teflon pin From gmclean at snf.stanford.edu Fri Feb 23 03:46:35 2001 From: gmclean at snf.stanford.edu (gmclean at snf.stanford.edu) Date: Feb 23, 2001 3:46:35 PM Subject: Problem drytek2 2001-02-23 15:46:33: retaining peg missing Message-ID: One plastic peg is missing on the electrode second from the bottom. I lost it somewhere in the chamber while moving it. From booth at snf.stanford.edu Mon Feb 26 08:03:00 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 26, 2001 8:03:00 AM Subject: Problem drytek2 2001-02-23 15:46:33: retaining peg missing Message-ID: installed teflon wafer pin on electrode #5 From zhang at snf.stanford.edu Wed Feb 28 09:28:57 2001 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Feb 28, 2001 9:28:57 AM Subject: Problem drytek2 2001-02-28 09:28:55: inner-left pin on 3rd tray missing Message-ID: From cbaxter at snf.stanford.edu Wed Feb 28 05:37:13 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 28, 2001 5:37:13 PM Subject: Problem drytek2 2001-02-28 09:28:55: inner-left pin on 3rd tray missing Message-ID: installed new teflon pin...