Shutdown drytek2 2001-02-13 13:04:43: reflected RF power jumps high during nitride etch

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Feb 13 06:48:52 PST 2001


found rf source to center cathode was loose tighten 
6/32 screw and ran recipe #2 using  sf6 and cf3br gases
and ran it for 15mins 2x was able to tune to 0 ref.  forward
power was stable @500watts. i also ran recipe#1 using
o2 gas...




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