From cbaxter at snf.stanford.edu Tue Jan 2 06:24:49 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 2, 2001 6:24:49 PM Subject: Shutdown drytek2 2001-01-02 18:24:41: need to change oil Message-ID: From cbaxter at snf.stanford.edu Tue Jan 2 09:09:24 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 2, 2001 9:09:24 PM Subject: Shutdown drytek2 2001-01-02 18:24:41: need to change oil Message-ID: oil and filter changed completed From lindaw at snf.stanford.edu Wed Jan 3 12:49:51 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jan 3, 2001 12:49:51 PM Subject: Problem drytek2 2001-01-03 12:49:37: No forward power Message-ID: while trying to set up process 1 descum, tuning the reflected power to 0, went to bring the forward power down from 475 to 400 W, and the forward power reading went to 0 and plasma went out. tried readjusting the load and tune, and the reflected power reading would change, but the forward power reading at the digital gage remains at 0, and no plasma. From latta at snf.stanford.edu Wed Jan 3 01:51:51 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 3, 2001 1:51:51 PM Subject: Shutdown drytek2 2001-01-03 13:51:49: No RF. Electrodes need to be flushed... Message-ID: From cbaxter at snf.stanford.edu Wed Jan 3 03:37:17 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 3, 2001 3:37:17 PM Subject: Problem drytek2 2001-01-03 12:49:37: No forward power Message-ID: manually tune cap and inductor. From cbaxter at snf.stanford.edu Wed Jan 3 03:37:44 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 3, 2001 3:37:44 PM Subject: Shutdown drytek2 2001-01-03 13:51:49: No RF. Electrodes need to be flushed... Message-ID: changed water filter. flow is back to normal From davehong at snf.stanford.edu Thu Jan 4 12:04:21 2001 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Jan 4, 2001 12:04:21 AM Subject: Problem drytek2 2001-01-04 00:04:15: Message-ID: The LOAD COMPLETE button on drytek2 does not go off. The chamber can be opened even if the LOAD COMPLETE button is on. I spent half an hour trying to tune RF power for process 3 and cannot get forward power to pass 425 (wants 500). I do not know if it is broken, so I did not diable it. From booth at snf.stanford.edu Thu Jan 4 08:49:25 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 4, 2001 8:49:25 AM Subject: Shutdown drytek2 2001-01-04 08:48:57: Message-ID: RF power supply failed. From cbaxter at snf.stanford.edu Mon Jan 8 11:03:32 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 8, 2001 11:03:32 PM Subject: Shutdown drytek2 2001-01-04 08:48:57: installed rectifier and all three cooling fan. rf tested Message-ID: From cbaxter at snf.stanford.edu Mon Jan 8 11:04:02 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 8, 2001 11:04:02 PM Subject: Problem drytek2 2001-01-04 00:04:15: changed rectifier and cooling fan Message-ID: From mbadi at snf.stanford.edu Thu Jan 11 10:53:59 2001 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Jan 11, 2001 10:53:59 PM Subject: Problem drytek2 2001-01-11 22:53:58: load complete light does not go off Message-ID: at the end of an etch run the load complete light comes on like it is supposed to, but it does not go off. Instead an error code sshows up in the the window for the flow pressure of gas #3 (it's a code that begins with the letter 'E' -- I don't remember the numbers that followed it) and the system just stays like that. The chamber has been venter, however, and the door opens easily. My fix for this problem was to hit Microreset (that turned the loadcomplete light off and got rid of the error code) and then proceed as normal. From booth at snf.stanford.edu Fri Jan 12 11:35:29 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 12, 2001 11:35:29 AM Subject: Problem drytek2 2001-01-11 22:53:58: load complete light does not go off Message-ID: From booth at snf.stanford.edu Mon Jan 22 07:49:56 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 22, 2001 7:49:56 AM Subject: Shutdown drytek2 2001-01-22 07:49:55: electrode cooling water flow below minimum. Message-ID: From booth at snf.stanford.edu Mon Jan 22 10:17:54 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 22, 2001 10:17:54 AM Subject: Shutdown drytek2 2001-01-22 07:49:55: electrode cooling water flow below minimum. Message-ID: cleared cooling passages. From anolley at snf.stanford.edu Tue Jan 30 09:16:10 2001 From: anolley at snf.stanford.edu (anolley at snf.stanford.edu) Date: Jan 30, 2001 9:16:10 AM Subject: Shutdown drytek2 2001-01-30 09:16:08: No power showing Message-ID: only reflected showing, no power From booth at snf.stanford.edu Tue Jan 30 10:45:16 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 30, 2001 10:45:16 AM Subject: Shutdown drytek2 2001-01-30 09:16:08: No power showing Message-ID: Trained user to tune RF. From ericp at snf.stanford.edu Wed Jan 31 01:31:53 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jan 31, 2001 1:31:53 AM Subject: Problem drytek2 2001-01-31 01:31:52: (minor) interlock problem Message-ID: Intelock indicated a problem when I enabled, Interlock WORKED as indicated by the green "on" light, but coral reported an interlock failure. From booth at snf.stanford.edu Wed Jan 31 06:46:01 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 31, 2001 6:46:01 AM Subject: Problem drytek2 2001-01-31 01:31:52: (minor) interlock problem Message-ID: Checked interlock this morning - works OK. Successfully performed enable & disable. Possibly a coral issue?