Problem drytek2 2001-01-04 00:04:15:

davehong at snf.stanford.edu davehong at snf.stanford.edu
Thu Jan 4 12:04:21 PST 2001


    The LOAD COMPLETE button on drytek2 does not go off.  The chamber can be opened even if the LOAD COMPLETE button is on.  I spent half an hour trying to tune RF power for process 3 and cannot get forward power to pass 425 (wants 500).
    I do not know if it is broken, so I did not diable it.
  




More information about the drytek2-pcs mailing list