From sanli at snf.stanford.edu Wed Jul 11 03:47:07 2001 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Jul 11, 2001 3:47:07 PM Subject: Problem drytek2 2001-07-11 15:47:07: don't use 3rd electrode from the top Message-ID: The teflon peg is out of its hole. I removed it and it is on a clean room wipe near the torc. From cbaxter at snf.stanford.edu Wed Jul 11 08:15:53 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 11, 2001 8:15:53 PM Subject: Problem drytek2 2001-07-11 15:47:07: don't use 3rd electrode from the top Message-ID: installed teflon pin From mbartsch at snf.stanford.edu Sat Jul 14 01:46:11 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Jul 14, 2001 1:46:11 PM Subject: Problem drytek2 2001-07-14 13:46:09: Unstable (?) Plasma, Nitride Etch Message-ID: On my second time through a 20min single wafer Nitride etch, plasma repeatedly destabilized without warning - RF power dropped, reflected power increased to over 200, plasma at 4th electrode from top went dark. Had to make significant changes to process 3 coil setting each time this happened to bring plasma back to its desired state. Gas flows and pressure remained normal. Very strange... From booth at snf.stanford.edu Mon Jul 16 08:42:12 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 16, 2001 8:42:12 AM Subject: Problem drytek2 2001-07-14 13:46:09: Unstable (?) Plasma, Nitride Etch Message-ID: could not duplicate problem. RF match unit tuned OK. From mbartsch at snf.stanford.edu Wed Jul 18 04:29:26 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Jul 18, 2001 4:29:26 PM Subject: Problem drytek2 2001-07-18 16:29:23: Plasma Destabilizes Message-ID: During Process 3 Nitride etch and Process 1 polymer cleanup, RF power and reflectance values change suddenly, plasma in 4th electrode goes dark. Can revive the plasma by tuning the coil for that process, but it must be tuned back shortly thereafter when the plasma destabilizes again. From cbaxter at snf.stanford.edu Wed Jul 18 05:05:53 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 18, 2001 5:05:53 PM Subject: Problem drytek2 2001-07-18 16:29:23: Plasma Destabilizes Message-ID: inductor and cap was out of phase.. From mbartsch at snf.stanford.edu Sun Jul 22 12:56:32 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Jul 22, 2001 12:56:32 AM Subject: Problem drytek2 2001-07-22 00:56:31: Electrode Cooling Problem Message-ID: After 5min nitride etch program, SPR220 resist appears to have reflowed. Electrodes must be heating up >90C during etch... From hphan at snf.stanford.edu Mon Jul 23 09:35:48 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jul 23, 2001 9:35:48 AM Subject: Shutdown drytek2 2001-07-23 09:35:47: Shutdown Message-ID: Cooling water is down. From booth at snf.stanford.edu Tue Jul 24 11:21:26 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 24, 2001 11:21:26 AM Subject: Problem drytek2 2001-07-22 00:56:31: Electrode Cooling Problem Message-ID: From booth at snf.stanford.edu Tue Jul 24 11:22:09 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 24, 2001 11:22:09 AM Subject: Shutdown drytek2 2001-07-23 09:35:47: Shutdown Message-ID: repaired electrode chiller blew crud out of electrode cooling passages. From grupp at snf.stanford.edu Mon Jul 30 10:42:16 2001 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Jul 30, 2001 10:42:16 PM Subject: Problem drytek2 2001-07-30 22:42:14: missing pin Message-ID: missing pin on back of 3rd slot from top From booth at snf.stanford.edu Tue Jul 31 07:11:22 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 31, 2001 7:11:22 AM Subject: Problem drytek2 2001-07-30 22:42:14: missing pin Message-ID: replaced teflon wafer pin.