Problem drytek2 2001-07-18 16:29:23: Plasma Destabilizes

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Wed Jul 18 04:29:26 PDT 2001


During Process 3 Nitride etch and Process 1 polymer cleanup, RF power and reflectance values change suddenly, plasma in 4th electrode goes dark.  Can revive the plasma by tuning the coil for that process, but it must be tuned back shortly thereafter when the plasma destabilizes again.




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