Problem drytek2 2001-07-22 00:56:31: Electrode Cooling Problem

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Sun Jul 22 12:56:32 PDT 2001


After 5min nitride etch program, SPR220 resist appears to have reflowed.  Electrodes must be heating up >90C during etch...




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