Problem drytek2 2001-10-28 18:25:57: teflon pin of chamber 2 is out
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Oct 29 07:32:24 PST 2001
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Problem drytek2 2001-10-28 18:25:57: teflon pin of chamber 2 is out
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installed new teflon wafer pins.
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Problem drytek2 2001-10-28 18:25:57: teflon pin of chamber 2 is out
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