From zappe at snf.stanford.edu Sat Sep 1 04:42:45 2001 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Sep 1, 2001 4:42:45 AM Subject: Problem drytek2 2001-09-01 04:42:44: prcss2 - no rf power Message-ID: gases under process 2 (poly-etch) came up but no RF power. process was aborted automatically. same process worked when run under process 3. From booth at snf.stanford.edu Tue Sep 4 07:25:26 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 4, 2001 7:25:26 AM Subject: Shutdown drytek2 2001-09-04 07:25:25: No electrode cooling water flow. Message-ID: From booth at snf.stanford.edu Tue Sep 4 08:29:31 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 4, 2001 8:29:31 AM Subject: Shutdown drytek2 2001-09-04 07:25:25: No electrode cooling water flow. Message-ID: replaced fuse. From booth at snf.stanford.edu Tue Sep 4 01:42:31 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 4, 2001 1:42:31 PM Subject: Problem drytek2 2001-09-01 04:42:44: prcss2 - no rf power Message-ID: ran poly etch using Process #2 & #3. ran normally, <20 watts reflected. From booth at snf.stanford.edu Wed Sep 5 08:44:01 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 5, 2001 8:44:01 AM Subject: Shutdown drytek2 2001-09-05 08:44:00: NO electrode water flow. Message-ID: From cbaxter at snf.stanford.edu Wed Sep 5 07:44:38 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 5, 2001 7:44:38 PM Subject: Shutdown drytek2 2001-09-05 08:44:00: NO electrode water flow. Message-ID: flush electrode 5x and changed filter. water is @2.0lpm From sguan at snf.stanford.edu Thu Sep 6 11:36:14 2001 From: sguan at snf.stanford.edu (sguan at snf.stanford.edu) Date: Sep 6, 2001 11:36:14 AM Subject: Problem drytek2 2001-09-06 11:36:11: three pins are missing from the bottom electrode Message-ID: From cbaxter at snf.stanford.edu Thu Sep 6 06:30:41 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 6, 2001 6:30:41 PM Subject: Problem drytek2 2001-09-06 11:36:11: three pins are missing from the bottom electrode Message-ID: installed pins From cbaxter at snf.stanford.edu Mon Sep 10 05:51:32 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 10, 2001 5:51:32 PM Subject: Shutdown drytek2 2001-09-10 17:51:30: shutdown for oil and filter change Message-ID: From cbaxter at snf.stanford.edu Mon Sep 10 09:59:24 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 10, 2001 9:59:24 PM Subject: Shutdown drytek2 2001-09-10 17:51:30: shutdown for oil and filter change Message-ID: completed oil and filters changed From phimmer at snf.stanford.edu Fri Sep 14 12:13:03 2001 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Sep 14, 2001 12:13:03 PM Subject: Shutdown drytek2 2001-09-14 12:13:01: Message-ID: electrode cooling water not flowing From booth at snf.stanford.edu Fri Sep 14 01:29:29 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 14, 2001 1:29:29 PM Subject: Shutdown drytek2 2001-09-14 12:13:01: Message-ID: restarted chiller. From qwang at snf.stanford.edu Wed Sep 26 04:01:41 2001 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Sep 26, 2001 4:01:41 PM Subject: Problem drytek2 2001-09-26 16:01:39: teflon pins broken Message-ID: The teflpn pins in plate2 and plate3 are broken From cbaxter at snf.stanford.edu Wed Sep 26 06:03:02 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 26, 2001 6:03:02 PM Subject: Problem drytek2 2001-09-26 16:01:39: teflon pins broken Message-ID: installed teflon pin From rgrow at snf.stanford.edu Thu Sep 27 07:38:29 2001 From: rgrow at snf.stanford.edu (rgrow at snf.stanford.edu) Date: Sep 27, 2001 7:38:29 PM Subject: Problem drytek2 2001-09-27 19:38:28: teflon pins Message-ID: front pins missing on shelves 2 and 6 (counting from top) From cbaxter at snf.stanford.edu Thu Sep 27 09:37:46 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 27, 2001 9:37:46 PM Subject: Problem drytek2 2001-09-27 19:38:28: teflon pins Message-ID: installed new teflon pins again.