Problem drytek2 2001-09-01 04:42:44: prcss2 - no rf power
zappe at snf.stanford.edu
zappe at snf.stanford.edu
Sat Sep 1 04:42:45 PDT 2001
gases under process 2 (poly-etch) came up but no RF power. process was aborted automatically.
same process worked when run under process 3.
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