Problem drytek2 2001-09-01 04:42:44: prcss2 - no rf power

zappe at snf.stanford.edu zappe at snf.stanford.edu
Sat Sep 1 04:42:45 PDT 2001


gases under process 2 (poly-etch) came up but no RF power. process was aborted automatically. 
same process worked when run under process 3.




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