Shutdown drytek2 2001-09-04 07:25:25: No electrode cooling water flow.
booth at snf.stanford.edu
booth at snf.stanford.edu
Tue Sep 4 07:25:26 PDT 2001
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Problem drytek2 2001-09-01 04:42:44: prcss2 - no rf power
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Shutdown drytek2 2001-09-04 07:25:25: No electrode cooling water flow.
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Problem drytek2 2001-09-01 04:42:44: prcss2 - no rf power
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Shutdown drytek2 2001-09-04 07:25:25: No electrode cooling water flow.
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