From pzwahlen at snf.stanford.edu Mon Apr 1 12:15:33 2002 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Apr 1, 2002 12:15:33 PM Subject: Shutdown drytek2 2002-04-01 12:15:33: cooling electrode below workable level Message-ID: From booth at snf.stanford.edu Mon Apr 1 12:29:16 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 1, 2002 12:29:16 PM Subject: Shutdown drytek2 2002-04-01 12:15:33: cooling electrode below workable level Message-ID: Replaced blown fuse in chiller. From jasmine at snf.stanford.edu Fri Apr 5 12:30:58 2002 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Apr 5, 2002 12:30:58 PM Subject: Problem drytek2 2002-04-05 12:30:58: teflon pins are being etched away Message-ID: Many of the pins need to be replaced From cbaxter at snf.stanford.edu Fri Apr 5 05:55:11 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 5, 2002 5:55:11 PM Subject: Problem drytek2 2002-04-05 12:30:58: teflon pins are being etched away Message-ID: changed 8 teflon pins From yyao at snf.stanford.edu Wed Apr 10 10:42:10 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Apr 10, 2002 10:42:10 AM Subject: Problem drytek2 2002-04-10 10:42:09: teflon pin lost in 4th chamber Message-ID: From booth at snf.stanford.edu Thu Apr 11 07:16:29 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 11, 2002 7:16:29 AM Subject: Problem drytek2 2002-04-10 10:42:09: teflon pin lost in 4th chamber Message-ID: replaced missing teflon pin From mbartsch at snf.stanford.edu Wed Apr 17 12:04:32 2002 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Apr 17, 2002 12:04:32 AM Subject: Problem drytek2 2002-04-17 00:04:32: 3rd el. rear pin missing Message-ID: From cbaxter at snf.stanford.edu Wed Apr 17 07:51:23 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 17, 2002 7:51:23 PM Subject: Problem drytek2 2002-04-17 00:04:32: 3rd el. rear pin missing Message-ID: installed two new teflon pin From cbaxter at snf.stanford.edu Thu Apr 18 07:34:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 18, 2002 7:34:09 PM Subject: Problem drytek2 2002-04-18 19:22:11: possible leak, O2 a bit pink Message-ID: did a manual leak and l/r is @10m/t per min. ran 30mins o2. From mbartsch at snf.stanford.edu Sat Apr 20 11:08:52 2002 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Apr 20, 2002 11:08:52 PM Subject: Problem drytek2 2002-04-20 23:08:47: chamber leak? Message-ID: Tried to run an O2 polymer cleanup, but plasma was bright pink/rose colored. Tried to run a nitride etch to see if the O2 line or the chamber was the problem, and the system never reached a suitable base pressure (never started flowing gases or running RF). Machine was unresponsive to "clear wafer" command during failed pumpdown. Tried cleaning chamber seal with a dry cleanroom wipe too...no effect. From booth at snf.stanford.edu Mon Apr 22 07:09:05 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 22, 2002 7:09:05 AM Subject: Problem drytek2 2002-04-20 23:08:47: chamber leak? Message-ID: replaced leaking bellows line.