Problem drytek2 2002-04-20 23:08:47: chamber leak?

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Sat Apr 20 11:08:52 PDT 2002


Tried to run an O2 polymer cleanup, but plasma was bright pink/rose colored.  Tried to run a nitride etch to see if the O2 line or the chamber was the problem, and the system never reached a suitable base pressure (never started flowing gases or running RF).  Machine was unresponsive to "clear wafer" command during failed pumpdown.  Tried cleaning chamber seal with a dry cleanroom wipe too...no effect.




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